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Polyimide MLD

PROM Request Title: 
Polyimide MLD
PROM Request Summary: 
Request to use MVD to develop polyimide film deposition.
PROM Date: 
10/13/2014
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
Polyimide MLD
Equipment List: 
Savannah ALD (savannah)
Fiji 2 ALD (fiji2)