LixAlyOz ALD
PROM Request Title:
LixAlyOz ALD
PROM Request Summary:
Request to make Lithium-Aluminum-Oxide in Savannah.
PROM Date:
09/03/2015
PROM Decision:
Request approved. Savannah chamber will need to be sent for cleaning after processing.
Link to PROM Request and supporting documentation:
Equipment List:
