Li2CO3 ALD
PROM Request Title:
Li2CO3 ALD
PROM Request Summary:
Request to perform ALD of Li2CO3 in Savannah. Request requires new precursors, equipment modification, and significant handling procedural changes to address safety issues.
PROM Date:
02/28/2014
PROM Decision:
Conditional Approval. Process is approved as documented. Equipment modifications will need to be documented and reviewed by PROM Committee.
Link to PROM Request and supporting documentation:
Equipment List:
