InAs on GaAs piece in Fiji2 and Savannah
PROM Request Title:
InAs on GaAs piece in Fiji2 and Savannah
PROM Request Summary:
Request to process InAs deposited on GaAs in gold-contamination ALD tools (Savannah and Fiji2).
PROM Date:
10/07/2014
PROM Decision:
Approved for documented quantities. Pieces need to cool in load lock before retrieval on Fiji2.
Link to PROM Request and supporting documentation:
Equipment List:
