Etching T12B SOG in PT-MTL

PROM Request Title:

PROM Request Summary:

Request to etch T12B spin on glass in PT-MTL etcher.

PROM Date:

07/25/2014

PROM Decision:

Approved. PT-Ox recommended due to CHF3 availability but material is approved for PT-MTL.

Link to PROM Request and supporting documentation:

Equipment List: