Cleaning Sapphire Wafer in wbclean 1 and 2
PROM Request Title:
Cleaning Sapphire Wafer in wbclean 1 and 2
PROM Request Summary:
Request to put non-traditional material, new sapphire wafers in wbclean 1 and 2.
PROM Date:
12/13/2018
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
