Skip to content Skip to navigation

AZ n LoF2020 in SNF headway

PROM Request Title: 
AZ n LoF2020 in SNF headway
PROM Request Summary: 
Request for new photoresist to be used in Headway.
PROM Date: 
11/20/2019
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
AZ n LoF2020 in SNF headway
Equipment List: 
Headway Manual Resist Spinner (headway2)
Karl Suss MA-6 Contact Aligner (karlsuss)
Wet Bench Miscellaneous (wbmiscres)