Annealing of 1cm2 GaAs chip at 400C and 450C in RTA
PROM Request Title:
Annealing of 1cm2 GaAs chip at 400C and 450C in RTA
PROM Request Summary:
Request to anneal GaAs in RTA. Similar to Xue Bai's original request. Documenting for As gas safety purposes.
PROM Date:
12/10/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
