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Vertical Semiconductor Blades

Project Type: 
E241
Date: 
June 2015
Areas of Interest: 
MOCVD, ASML, double exposure, JEOL, InSb, Ox III-V
Processing Technique (former Function and Method): 
Researchers and (Mentors): 
Martin Winterkorn, Anup Dadlani, Karen Kim, (J Provine)