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Community Service P-GaN/AlGAN/GaN E-mode HEMT

Project Type:

Community Service

Date:

December 2020

Report(s):

Community Service Project P-GaN/AlGAN/GaN E-mode HEMT- Final Report

Community Service Extension Request: P-GaN/AlGAN/GaN E-mode HEMT

Community Service P-GaN/AlGAN/GaN E-mode HEMT Project Proposal

Processing Technique (former Function and Method):

Metal-Organic (MO) CVD

Researchers and (Mentors):

Seungbin Jeong (Xiaoqing Xu)

List of Important Equipment:

Aixtron MOCVD - III-N system (aix-ccs)

Oxford III-V etcher (Ox-35)

Materials

Aluminum Gallium Nitride (AlGaN)

III-N materials (III-N materials)

Gallium Nitride (GaN)