Skip to content
Skip to navigation
SUNetID Login
SUNetID Login
Stanford Nanofabrication Facility
Lab User Guide
Navigation menu
Guide Main Menu
SNF Home
Guide Home
Techniques
Overview
Processing Techniques
Projects
Nano Nuggets
Processes
Runsheets
Safety
Overview
Safety Policies
Safety Training
SDS
Camera Policies
Training
Overview
Training Calendar
Training Course Online
Training Shadowing Form
Training Videos
Materials
Overview
Cleanliness Groups
New Process or Material Requests (PROM)
Chemicals List
Materials List
Gases List
Useful Links
Overview
Wafer Dopant and Resistivity Specs
SNF Badger Accounts
Events
News
Discussion Lists*
Community Bulletin Board
External Links
Archive of previous wiki
People
Staff List
For Emergencies
Technical Liaisons
Equipment
Equipment Table
Characterization Equipment
CVD Equipment
Doping Equipment
Dry Etch Equipment
Metallization Equipment
Photolithography Equipment
Wet Bench Equipment
Materials
Overview
Cleanliness Groups
New Process or Material Requests (PROM)
Chemicals List
Materials List
Gases List
Palladium
Chemical Formula:
Pd
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Intlvac Evaporation
Intlvac_evap
Clean
Semiclean
SNF Cleanroom Paul G Allen L107
0
-
1 μm
Al
Co
Cr
Ge
Hf
Mo
Nb
Ni
Pd
Si
Ta
Ti
V
W
Zr
Innotec Evaporator
Innotec
Flexible
SNF Cleanroom Paul G Allen L107
Ag
Al
Au
Co
Cr
Cu
Fe
Ge
In
Mo
Ni
Pd
Si
Ta
Ti
W
Lesker2 Sputter
lesker2-sputter
Semiclean
SNF Cleanroom Paul G Allen L107
1 μm
Ag
Al
Al
2
O
3
AlSi
Cr
Ge
In
x
Sn
y
O
z
Mo
Pd
Ru
Sc
Si
SiO
2
Sn
Ta
Ti
TiN
W
AJA2 Evaporator
aja2-evap
Semiclean
SNF Cleanroom Paul G Allen L107
0
-
300 nm
Ag
Al
Co
Cr
Ge
Hf
Mo
Nb
Pd
Pt
Si
Ta
Ti
V
W
Zr
AJA Evaporator
aja-evap
Flexible
SNF Exfab Paul G Allen 155A Venice
0
-
300 nm
Ag
Al
Au
Co
Cr
Cu
Fe
Ge
Hf
Ni
Ni
x
O
y
Pd
Pt
SiO
2
Ti
TiO
2
Lesker Sputter
lesker-sputter
Flexible
SNF Exfab Paul G Allen 155A Venice
Ag
Al
Al
2
O
3
AlSi
Au
Co
Cr
Cu
Fe
In
x
Sn
y
O
z
Nb
Ni
Pd
Si
SiO
2
Ta
Ti
TiN
W
Etch Equipment
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.