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Palladium

Chemical Formula:

Pd

Equipment Tabs

Deposition Equipment

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
Intlvac Evaporation Intlvac_evap	Clean Semiclean	SNF Cleanroom Paul G Allen L107	0 - 1 μm	Al Co Cr Ge Hf Mo Nb Ni Pd Si Ta Ti V W Zr
Innotec Evaporator Innotec	Flexible	SNF Cleanroom Paul G Allen L107		Ag Al Au Co Cr Cu Fe Ge In Mo Ni Pd Si Ta Ti W
Lesker2 Sputter lesker2-sputter	Semiclean	SNF Cleanroom Paul G Allen L107	1 μm	Ag Al Al₂O₃ AlSi Cr Ge In_xSn_yO_z Mo Pd Ru Sc Si SiO₂ Sn Ta Ti TiN W
AJA2 Evaporator aja2-evap	Semiclean	SNF Cleanroom Paul G Allen L107	0 - 300 nm	Ag Al Co Cr Ge Hf Mo Nb Pd Pt Si Ta Ti V W Zr
AJA Evaporator aja-evap	Flexible	SNF Exfab Paul G Allen 155A Venice	0 - 300 nm	Ag Al Au Co Cr Cu Fe Ge Hf Ni Ni_xO_y Pd Pt SiO₂ Ti TiO₂
Lesker Sputter lesker-sputter	Flexible	SNF Exfab Paul G Allen 155A Venice		Ag Al Al₂O₃ AlSi Au Co Cr Cu Fe In_xSn_yO_z Nb Ni Pd Si SiO₂ Ta Ti TiN W

Etch Equipment

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