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Oven (White) (white-oven)

Overview

For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.

Cleanliness: 
Flexible

Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
0 °C - 200 °C
Notes: 

For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C, programmable.

Lab Organization, Location, and NEMO Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
NEMO Area: 
SNF: Photolithography
NEMO ID: 
white-oven

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Training Charges: 
0.50 hours
Primary Trainer: 
Cliff Knollenberg
Backup Trainer(s): 
Uli Thumser
Primary Maintenance: 
Mario Vilanova
Backup Maintenance: 
Gary Sosa

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Contact the primary trainer: Cliff Knollenberg