STS Deep RIE Etcher Training
Steps to become a tool user
Check the training calendar to for any scheduled training:
Read the relevant operating procedures before the training session:
Optional: For background on "Plasma Etching" and "Choosing an Etcher", Online training required. Open Online Course
for general information about the online training. for general information about the Lagunita online training.
Go to Go to Online Nano Course Login
to log in directly to the course. to log in directly to the course. Go to "nano@stanford" and then to the "Dry Etching" Section for the three videos on plasma etching principles and go to the "Choosing a Dry Etching Process" section for guidelines for choosing the right equipment.
Attend the training session to be qualified.
Equipment Covered by this Training