ThermcoPoly2 (thermcopoly2)
Overview
The third furnace from the top in Thermco bank2 is the ThermcoPoly2 Furnace.
SNF staff
Same as ThermcoPoly1 but in the "flexible cleanliness" group. Materials can be processed in this furnace, as long as they do not contain materials with high vapor pressure at deposition temperatures (such as zinc or many II-VI or III-V compounds.) Contact SNF PromCommittee for questions about specific materials.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Cleaning Required:
Pre-Diffusion Clean
Lab Supplied Materials
Material Thickness Range: 100.0 Å - 3.0 μm
Process Temperature Range:
525 °C - 650 °C
Gases
Substrate Sizes
Maximum Load:
44
Notes:
Standard polysilicon deposition at 620C. P and N doping available.
Lab Organization, Location, and Badger Information
Lab Organization:
Location:
Badger Area:
SNF: Chemical Vapor Deposition
Badger ID:
thermcopoly2
Training and Maintenance
Lab Facility:
Training Charges:
3.00 hours
Primary Trainer:
Primary Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Contact the primary trainer: Alex Denton
