SNF is open under New Normal Rules. ANY shadowing must be coordinated with SNF staff first.
Thermco Bank one containing ThermcoNitride.
Silicon nitride (or nitride or Si3N4) is deposited at moderately high temperatures (~800C) and low pressure (~250 mtorr), using dichlorosilane (SiCl2H2) and ammonia (NH3). This furnace handles wafer up to 6 inch.
Stociometric and low stress (~150mPa) programs available