Thermco1 Oxidation Furnace (thermco1)
Overview
The top furnace in Thermco Bank1 is the Thermco1 oxidation Furnace.
As of 8/1/23, this furnace is shut down and will be permanently removed from the cleanroom. It will be replaced by a new Tystar furnace in March 2024. Find the current project schedule and more information here.
Thermco1-4 furnaces are used for wet and dry oxidation processing and N2 annealing.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Cleaning Required:
Pre-Diffusion Clean
Lab Supplied Materials
Material Thickness Range: 25.0 Å - 2.0 μm
Process Temperature Range:
700 °C - 1100 °C
Gases
Substrate Type
Substrate Sizes
Maximum Load:
50
Notes:
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.
Lab Organization, Location, and Badger Information
Lab Organization:
Location:
Badger Area:
SNF: Annealing, Oxidation and Doping
Badger ID:
thermco1
