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Thermco1 Oxidation Furnace (thermco1)


The top furnace in Thermco Bank1 is the Thermco1 oxidation Furnace.

As of 8/1/23, this furnace is shut down and will be permanently removed from the cleanroom. It will be replaced by a new Tystar furnace in March 2024. Find the current project schedule and more information here.


Thermco1-4 furnaces are used for wet and dry oxidation processing and N2 annealing.


Capabilities and Specifications

Cleaning Required: 
Pre-Diffusion Clean
Material Thickness Range: 25.0 Å - 2.0 μm
Process Temperature Range: 
700 °C - 1100 °C
Maximum Load: 

Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.

Lab Organization, Location, and Badger Information

Lab Organization: 
Badger Area: 
SNF: Annealing, Oxidation and Doping
Badger ID: