As of 8/1/23, this furnace is shut down and will be permanently removed from the cleanroom. It will be replaced by a new Tystar furnace in March 2024. Find the current project schedule and more information here.
Thermco1-4 furnaces are used for wet and dry oxidation processing and N2 annealing.
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.