SNF is open under New Normal Rules. ANY shadowing must be coordinated with SNF staff first.
Teos2 is the third furnace from the top of the Tylan2 bank.
Teos2 furnace allows LPCVD deposition of silicon dioxide, using tetraethyl orthosilicate (TEOS) which can provide a more conformal coating at lower temperature than tylanbpsg films. This is a six inch tube.
Very conformal.