Technics Asher (technics)
Technics PE II-A is used for descum, resist strip and surface treatment with O2 plasma at ambient temperature. It is a planar etch system with 30kHz generator and upto 500W. No magnetic materials are allowed in this system.
Capabilities and Specifications
Primary Materials Etched
Primary Materials Etched:
Process Temperature Range:
Four 4" wafers to pieces, one 6" or 8" wafer
Lab Facility, Location, and Badger Information
Training and Maintenance
Steps to become a tool user
Read the relevant operating procedures:
Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form
on clean room paper or down load it. Complete the form and get the signature of the trainer.