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Technics Asher (technics)

Overview

Technics PE II-A is used for descum, resist strip and surface treatment with O2 plasma at ambient temperature.  It is a planar etch system with 30kHz generator and upto 500W.  No magnetic materials are allowed in this system.

Cleanliness: 

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 
Four 4" wafers to pieces, one 6" or 8" wafer

Lab Organization, Location, and Badger Information

Badger Area: 
SNF: Dry Etching
Badger ID: 
technics

Training and Maintenance

Lab Facility: 
Training Charges: 
0.50 hours
Primary Trainer: 
Primary Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Contact the primary trainer: .

Operating Instructions