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STS Plasma Enhanced CVD (sts)

Overview

Cleanliness: 

Capabilities and Specifications

Material Thickness Range: 100.0 Å - 4.5 μm
Process Temperature Range: 
350 ºC
Maximum Load: 
Four 4 inch or one 6 inch or one 8 inch

Lab Facility, Location, and Badger Information

Training and Maintenance

photo of sts
Lab Facility: 
Training Charges: 
1.50 hours
Primary Trainer: 
Primary Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Check the training calendar for any scheduled training: .
  2. Read the relevant operating procedures:
  3. Contact the primary trainer, , to sign up for the training or to schedule a training if none is scheduled.
  4. Atend the training session and get qualified.

Operating Instructions