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Equipment name & Badger ID Location Image Overview Link to Training
HMDS Vapor Prime Oven, YES
yes
SNF Cleanroom Paul G Allen L107

The YES prime oven dehydrates the wafers at 150ÂșC and primes the wafers using HMDS (Hexamethyldisilazane) allowing better coverage and adhesion between oxides and resists.Read more

YES Prime Oven Training