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Resist Coat (automatic)

There is automated equipment available for dispensing resists under "standard" conditions.

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Equipment name & Badger ID Location Image Overview Link to Training
SVG Resist Coat Track 1
svgcoat
SNF Cleanroom Paul G Allen L107

The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which...Read more

SVG Resist Coat Tracks 1 and 2 Training
SVG Resist Coat Track 2
svgcoat2
SNF Cleanroom Paul G Allen L107
SVGcoat2 back track

The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which...Read more

SVG Resist Coat Tracks 1 and 2 Training