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Resist coat

Coating is the term used to cover the substrate (wafer or piece) with a UV light sensitive film that is used to pattern the surface of the material. Spin coating is the most popular method.

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Equipment name & Badger ID Location Image Overview Link to Training
EVG 101 Spray Coater
evgspraycoat
SNF Cleanroom Paul G Allen L107 EVG 101 Spray Coater Training
Headway 3 Manual Resist Spinner
headway3
SNF Exfab Paul G Allen 104 Stinson

The Headway Coater is used to manually apply photoresist to any substrate. Centrifugal force uniformly spreads fluid across the surface of the spinning substrate. The spin speed, spin time substrate...Read more

Headway 3 Training
Headway Manual Resist Spinner
headway2
SNF Cleanroom Paul G Allen L107
Headway2 manaul resist coater

The Headway Coater is used to apply photoresist to any substrate. Centrifugal force uniformly spreads fluid across the surface of the spinning substrate. The spin speed, spin time, and substrate...Read more

Headway Manual Resist Spinner Training
Laurell Manual Resist Spinner
laurell-R
SNF Cleanroom Paul G Allen L107 Laurell Manual Resist Spinner Training
Micro Mist Coater PDR-04
micromist-coater
SNF Exfab Paul G Allen 104 Stinson

The Micro Mist coater is a research grade mini electrospray tool. It can be used to blanket coat material onto a substrate with minimal wastage of the material. It can...Read more

Micromist Coater Training
SVG Resist Coat Track 1
svgcoat
SNF Cleanroom Paul G Allen L107

The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which...Read more

SVG Resist Coat Tracks 1 and 2 Training
SVG Resist Coat Track 2
svgcoat2
SNF Cleanroom Paul G Allen L107
SVGcoat2 back track

The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which...Read more

SVG Resist Coat Tracks 1 and 2 Training