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Oven Bake

Equipment name & Badger ID Location Image Overview Link to Training Process Temperature Range
110°C Oven
oven110
SNF Cleanroom Paul G Allen L107

The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.

110°C Oven Training
110 ºC
90°C Oven
oven90
SNF Cleanroom Paul G Allen L107

The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.

90°C Oven Training
90 ºC
Blue M Oven
bluem
SNF Cleanroom Paul G Allen L107

The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.

Blue M Oven Training
0 °C - 430 °C
Ultraviolet Photoresist Cure
uvcure
SNF Cleanroom Paul G Allen L107 Ultraviolet Photoresist Cure Training
White Oven
white-oven
SNF Cleanroom Paul G Allen L107

For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.

White Oven Training
0 °C - 200 °C
Equipment name & Badger ID Location Image Overview Link to Training
110°C Oven
oven110
SNF Cleanroom Paul G Allen L107

The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.Read more

110°C Oven Training
90°C Oven
oven90
SNF Cleanroom Paul G Allen L107

The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.Read more

90°C Oven Training
Blue M Oven
bluem
SNF Cleanroom Paul G Allen L107

The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.Read more

Blue M Oven Training
Ultraviolet Photoresist Cure
uvcure
SNF Cleanroom Paul G Allen L107 Ultraviolet Photoresist Cure Training
White Oven
white-oven
SNF Cleanroom Paul G Allen L107

For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.Read more

White Oven Training