Equipment name & Badger ID | Location | Image | Overview | Link to Training | Process Temperature Range |
---|---|---|---|---|---|
110°C Oven oven110 |
SNF Cleanroom Paul G Allen L107 |
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The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake. |
110°C Oven Training |
110 ºC
|
90°C Oven oven90 |
SNF Cleanroom Paul G Allen L107 |
![]() |
The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating. |
90°C Oven Training |
90 ºC
|
Blue M Oven bluem |
SNF Cleanroom Paul G Allen L107 |
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The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide. |
Blue M Oven Training |
0 °C - 430 °C
|
Ultraviolet Photoresist Cure uvcure |
SNF Cleanroom Paul G Allen L107 |
primary wavelength: 254 nm |
Ultraviolet Photoresist Cure Training |
|
|
White Oven white-oven |
SNF Cleanroom Paul G Allen L107 |
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For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable. |
White Oven Training |
0 °C - 200 °C
|
Equipment name & Badger ID | Location | Image | Overview | Link to Training |
---|---|---|---|---|
110°C Oven oven110 |
SNF Cleanroom Paul G Allen L107 |
![]() |
The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.Read more |
110°C Oven Training |
90°C Oven oven90 |
SNF Cleanroom Paul G Allen L107 |
![]() |
The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.Read more |
90°C Oven Training |
Blue M Oven bluem |
SNF Cleanroom Paul G Allen L107 |
![]() |
The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.Read more |
Blue M Oven Training |
Ultraviolet Photoresist Cure uvcure |
SNF Cleanroom Paul G Allen L107 |
primary wavelength: 254 nmRead more |
Ultraviolet Photoresist Cure Training | |
White Oven white-oven |
SNF Cleanroom Paul G Allen L107 |
![]() |
For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.Read more |
White Oven Training |