Oven Bake

Equipment name & Badger ID	Location	Overview	Link to Training	Process Temperature Range
110°C Oven oven110	SNF Cleanroom Paul G Allen L107	The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.	110°C Oven Training	110 ºC
90°C Oven oven90	SNF Cleanroom Paul G Allen L107	The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.	90°C Oven Training	90 ºC
Blue M Oven bluem	SNF Cleanroom Paul G Allen L107	The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.	Blue M Oven Training	0 °C - 430 °C
Ultraviolet Photoresist Cure uvcure	SNF Cleanroom Paul G Allen L107	primary wavelength: 254 nm	Ultraviolet Photoresist Cure Training
White Oven white-oven	SNF Cleanroom Paul G Allen L107	For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.	White Oven Training	0 °C - 200 °C

Equipment name & Badger ID	Location	Overview	Link to Training
110°C Oven oven110	SNF Cleanroom Paul G Allen L107	The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.Read more	110°C Oven Training
90°C Oven oven90	SNF Cleanroom Paul G Allen L107	The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.Read more	90°C Oven Training
Blue M Oven bluem	SNF Cleanroom Paul G Allen L107	The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.Read more	Blue M Oven Training
Ultraviolet Photoresist Cure uvcure	SNF Cleanroom Paul G Allen L107	primary wavelength: 254 nmRead more	Ultraviolet Photoresist Cure Training
White Oven white-oven	SNF Cleanroom Paul G Allen L107	For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.Read more	White Oven Training

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