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Resist Bake

Resists contain solvents which are used to control the viscosity of the materials during coating, and bakes are used to drive out solvents to control the resist patterning quality.

Equipment name & Badger ID	Location	Image	Overview	Link to Training	Process Temperature Range
110°C Oven oven110	SNF Cleanroom Paul G Allen L107		The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.	110°C Oven Training	110 ºC
90°C Oven oven90	SNF Cleanroom Paul G Allen L107		The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.	90°C Oven Training	90 ºC
Blue M Oven bluem	SNF Cleanroom Paul G Allen L107		The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.	Blue M Oven Training	0 °C - 430 °C
Ultraviolet Photoresist Cure uvcure	SNF Cleanroom Paul G Allen L107		primary wavelength: 254 nm	Ultraviolet Photoresist Cure Training
White Oven white-oven	SNF Cleanroom Paul G Allen L107		For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.	White Oven Training	0 °C - 200 °C

Equipment name & Badger ID	Location	Image	Overview	Link to Training
110°C Oven oven110	SNF Cleanroom Paul G Allen L107		The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.Read more	110°C Oven Training
90°C Oven oven90	SNF Cleanroom Paul G Allen L107		The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.Read more	90°C Oven Training
Blue M Oven bluem	SNF Cleanroom Paul G Allen L107		The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.Read more	Blue M Oven Training
Ultraviolet Photoresist Cure uvcure	SNF Cleanroom Paul G Allen L107		primary wavelength: 254 nmRead more	Ultraviolet Photoresist Cure Training
White Oven white-oven	SNF Cleanroom Paul G Allen L107		For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.Read more	White Oven Training