Resist Bake
Resists contain solvents which are used to control the viscosity of the materials during coating, and bakes are used to drive out solvents to control the resist patterning quality.
| Equipment name & Badger ID | Location | Image | Overview | Link to Training | Process Temperature Range |
|---|---|---|---|---|---|
|
110°C Oven oven110 |
SNF Cleanroom Paul G Allen L107 |
 |
The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake. |
110°C Oven Training |
110 ºC
|
|
90°C Oven oven90 |
SNF Cleanroom Paul G Allen L107 |
 |
The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating. |
90°C Oven Training |
90 ºC
|
|
Blue M Oven bluem |
SNF Cleanroom Paul G Allen L107 |
 |
The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide. |
Blue M Oven Training |
0 °C - 430 °C
|
|
Ultraviolet Photoresist Cure uvcure |
SNF Cleanroom Paul G Allen L107 |
primary wavelength: 254 nm |
Ultraviolet Photoresist Cure Training |
|
|
|
White Oven white-oven |
SNF Cleanroom Paul G Allen L107 |
 |
For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable. |
White Oven Training |
0 °C - 200 °C
|
| Equipment name & Badger ID | Location | Image | Overview | Link to Training |
|---|---|---|---|---|
|
110°C Oven oven110 |
SNF Cleanroom Paul G Allen L107 |
|
The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.Read more |
110°C Oven Training |
|
90°C Oven oven90 |
SNF Cleanroom Paul G Allen L107 |
|
The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.Read more |
90°C Oven Training |
|
Blue M Oven bluem |
SNF Cleanroom Paul G Allen L107 |
|
The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.Read more |
Blue M Oven Training |
|
Ultraviolet Photoresist Cure uvcure |
SNF Cleanroom Paul G Allen L107 |
primary wavelength: 254 nmRead more |
Ultraviolet Photoresist Cure Training | |
|
White Oven white-oven |
SNF Cleanroom Paul G Allen L107 |
|
For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.Read more |
White Oven Training |
