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Resist Bake

Resists contain solvents which are used to control the viscosity of the materials during coating, and bakes are used to drive out solvents to control the resist patterning quality.

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Equipment name & Badger ID Location Image Overview Link to Training Process Temperature Range
110°C Oven
oven110
SNF Cleanroom Paul G Allen L107

The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.

110°C Oven Training
110 ºC
90°C Oven
oven90
SNF Cleanroom Paul G Allen L107

The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.

90°C Oven Training
90 ºC
Blue M Oven
bluem
SNF Cleanroom Paul G Allen L107

The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.

Blue M Oven Training
0 °C - 430 °C
Ultraviolet Photoresist Cure
uvcure
SNF Cleanroom Paul G Allen L107 Ultraviolet Photoresist Cure Training
White Oven
white-oven
SNF Cleanroom Paul G Allen L107

For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.

White Oven Training
0 °C - 200 °C
Equipment name & Badger ID Location Image Overview Link to Training
110°C Oven
oven110
SNF Cleanroom Paul G Allen L107

The 110°C Oven bakes the wafers with resist at 110ºC after the development, called post-bake.Read more

110°C Oven Training
90°C Oven
oven90
SNF Cleanroom Paul G Allen L107

The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.Read more

90°C Oven Training
Blue M Oven
bluem
SNF Cleanroom Paul G Allen L107

The BlueM oven is for 200°C to 437°C temperature bakes, i.e. polyimide.Read more

Blue M Oven Training
Ultraviolet Photoresist Cure
uvcure
SNF Cleanroom Paul G Allen L107 Ultraviolet Photoresist Cure Training
White Oven
white-oven
SNF Cleanroom Paul G Allen L107

For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C. This oven is programmable.Read more

White Oven Training