Direct Write

Equipment name & Badger ID	Location	Image	Overview	Link to Training
Heidelberg MLA 150 heidelberg	SNF Exfab Paul G Allen 104 Stinson		The MLA150 is a high speed direct write lithography tool...Read more	Heidelberg Training
Heidelberg MLA 150 - 2 heidelberg2	SNF Cleanroom Paul G Allen L107		The MLA150 is a high speed direct write lithography tool...Read more	Heidelberg Training

Project

Final Presentation: Grayscale lithography for chiral nanophotonic structures
Grayscale lithography for chiral nanophotonic structures: Final Report
Heidelberg MLA 150 Operating Instructions
Helpful hints for grayscale lithography on the Heidelberg MLA 150

When using grayscale lithography on the Heidelberg, there are a few quirks that may slow down your progress. This document provides some warnings and helpful tricks to overcome the common roadblocks.
Helpful hints for grayscale lithography on the Heidelberg MLA 150

When using grayscale lithography on the Heidelberg, there are a few quirks that may slow down your progress. This document provides some warnings and helpful tricks to overcome the common roadblocks.
Overview of JEOL EBL for Curved Structures
Stanford Nanoscribe Operating Procedure

This is the operating procedure written by our researchers for use of our Nanoscribe.
Stanford Nanoscribe Operating Procedure

This is the operating procedure written by our researchers for use of our Nanoscribe.
Tiny Tale Gets Grand

Professor Richard Feynman issued a challenge to the world in 1960 to miniaturize the text on a page of a book to such an extent that it could be readable by an electron microscope. Twenty-six years later, Tom Newman, Stanford Graduate Student of Professor Fabian Pease finally claimed the $1,000 prize!

Equipment name & Badger ID	Location	Image	Overview	Link to Training
Heidelberg MLA 150 heidelberg	SNF Exfab Paul G Allen 104 Stinson		The MLA150 is a high speed direct write lithography tool extended by capabilities formerly only available on Mask Aligners. It can expose the patterns directly without prior fabrication of a...Read more	Heidelberg Training
Heidelberg MLA 150 - 2 heidelberg2	SNF Cleanroom Paul G Allen L107		The MLA150 is a high speed direct write lithography tool extended by capabilities formerly only available on Mask Aligners. It can expose the patterns directly without prior fabrication of a...Read more	Heidelberg Training

Final Presentation: Grayscale lithography for chiral nanophotonic structures
Grayscale lithography for chiral nanophotonic structures: Final Report
Heidelberg MLA 150 Operating Instructions
Helpful hints for grayscale lithography on the Heidelberg MLA 150

When using grayscale lithography on the Heidelberg, there are a few quirks that may slow down your progress. This document provides some warnings and helpful tricks to overcome the common roadblocks.
Helpful hints for grayscale lithography on the Heidelberg MLA 150

When using grayscale lithography on the Heidelberg, there are a few quirks that may slow down your progress. This document provides some warnings and helpful tricks to overcome the common roadblocks.
Overview of JEOL EBL for Curved Structures
Stanford Nanoscribe Operating Procedure

This is the operating procedure written by our researchers for use of our Nanoscribe.
Stanford Nanoscribe Operating Procedure

This is the operating procedure written by our researchers for use of our Nanoscribe.
Tiny Tale Gets Grand

Professor Richard Feynman issued a challenge to the world in 1960 to miniaturize the text on a page of a book to such an extent that it could be readable by an electron microscope. Twenty-six years later, Tom Newman, Stanford Graduate Student of Professor Fabian Pease finally claimed the $1,000 prize!