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Deposition

Deposition covers a wide variety of methods that are used to add a wide variety of materials. The subcategories here can be useful to help narrow down your search.

  • Atomic Layer Deposition (ALD) is used to deposit less than 50nm of highly conformal films.
  • Chemical Vapor Deposition (CVD) is used to deposit films less than 5μm thick, carbon nanotubes, and graphene.
  • Deposited III-N uses a type of CVD called MOCVD to deposit the nitrides of materials that are found in group III of the periodic table.
  • Deposited III-V uses a type of CVD called MOCVD to deposit combinations of materials from group III and group V of the periodic table.
  • Ink lists the equipment that can be used to print inks that are either commercially available or made by the user.
  • Physical Vapor Deposition (PVD) is used to deposit primarily metal layers as well as some dielectrics.
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Equipment name & Badger ID Location Image Overview Materials Lab Supplied Link to Trainingsort descending
Fiji 1
fiji1
SNF Cleanroom Paul G Allen L107
photo of Fiji1 in SNF Cleanroom

Fiji1 is a load-locked, plasma-enabled atomic layer deposition (ALD) system....

Fiji 1 and 2 Training
Fiji 2
fiji2
SNF Cleanroom Paul G Allen L107
photo of Fiji2 in SNF Cleanroom

Fiji2 is a load-locked, plasma-enabled atomic layer deposition (ALD) system....

Fiji 1 and 2 Training
Fiji 3
fiji3
SNF Cleanroom Paul G Allen L107
photo of Fiji3 in SNF Cleanroom

The Fiji3 ALD system from Cambridge Nanotech/Ultratech is a plasma...

Fiji 3 Training
Savannah
savannah
SNF Cleanroom Paul G Allen L107
photo of Savannah in SNF cleanroom

Savannah is a thermal atomic layer deposition (ALD) system. It...

Savannah Training
MVD
mvd
SNF Cleanroom Paul G Allen L107

MVD is a molecular vapor deposition (MVD) system. It is...

MVD Training
Aixtron Black Magic graphene CVD furnace
aixtron-graphene
SNF Exfab Paul G Allen L119 Año Nuevo

CVD-Graphene The Aixtron Black Magic CVD furnace is dedicated to...

Aixtron Black Magic graphene CVD furnace training
Aix-ccs
aix-ccs
SNF MOCVD Paul G Allen 213XA
aix-ccs MOCVD

Aixtron MOCVD for III-N semiconductors: InN, GaN, AlN, InGaN, InAlN,...

Aixtron MOCVD - III-N system training
Aix200
aix200
SNF MOCVD Paul G Allen 213XA
aix-200 MOCVD

Aixtron MOCVD for III-V and dilute nitride semiconductors: InAs, GaAs,...

Aixtron MOCVD - III-V system training
AJA2 Evaporator
aja2-evap
SNF Cleanroom Paul G Allen L107

The AJA e-beam evaporator can be used to directionally deposit...

AJA2 Evaporator
Epi2
epi2
SNF Cleanroom Paul G Allen L107
Applied Materials Centura Epi2  tool in SNF

Epi2 is the the first chamber on the tool and...

AMAT Centurion Epitaxial Training
First Nano carbon nanotube CVD furnace
cvd-nanotube
SNF Exfab Paul G Allen L119 Año Nuevo

CVD-Nanotube The First Nano CVD furnace is dedicated to carbon...

cvd-nanotube training
Fujifilm Dimatix Ink Jet Printer
nanoinkjet
SNF Exfab Paul G Allen 155 Mavericks
Dimatix Ink Jet Printer Training
Hummer V Sputter Coater
hummer
SNF Exfab Paul G Allen L119 Año Nuevo

The Technics Hummer V is a manually controlled table top...

Hummer V Sputter Coater Training
Lesker2 Sputter
lesker2-sputter
SNF Cleanroom Paul G Allen L107
Lesker2-Sputter

Lesker2 is a load locked single wafer metal sputter providing...

Lesker2 Sputter Training
Optomec Printer
optomec-printer
SNF Exfab Paul G Allen 155A Venice

The Aerosol Jet (AJ) 300 system provides the ability to...

Optomec Printer Training
PlasmaTherm Shuttlelock PECVD System
ccp-dep
SNF Cleanroom Paul G Allen L107
PlasmaTherm Shuttlelock PECVD System Training
STS Plasma Enhanced CVD
sts
SNF Cleanroom Paul G Allen L107
STS Plasma Enhanced CVD Training
ThermcoNitride
thermconitride1
SNF Cleanroom Paul G Allen L107

Silicon nitride (or nitride or Si3N4) is deposited at moderately...

Thermco Nitride Deposition Furnace Training
ThermcoPoly1
thermcopoly1
SNF Cleanroom Paul G Allen L107

Polycrystalline silicon (also called "poly-Si" or "poly") is deposited at...

Thermco Poly Deposition Furnace Training
ThermcoPoly2
thermcopoly2
SNF Cleanroom Paul G Allen L107

Same as ThermcoPoly1 but in the "flexible (gold-contaminated)" group.  ...

Thermco Poly Deposition Furnace Training

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