Deposited SiGe
A deposited layer of SiGe. The ratio of Si to Ge can be controlled and will vary depending on the application.
| Equipment name & Badger ID | Location | Image | Overview | Materials Lab Supplied | Link to Training |
|---|---|---|---|---|---|
|
Epi2 epi2 |
SNF Cleanroom Paul G Allen L107 |
 |
Epi2 is the the first chamber on the tool and... |
AMAT Centurion Epitaxial Training | |
|
ThermcoPoly1 thermcopoly1 |
SNF Cleanroom Paul G Allen L107 |
 |
Polycrystalline silicon (also called "poly-Si" or "poly") is deposited at... |
Thermco Poly Deposition Furnace Training | |
|
ThermcoPoly2 thermcopoly2 |
SNF Cleanroom Paul G Allen L107 |
 |
Same as ThermcoPoly1 but in the "flexible (gold-contaminated)" group. ... |
Thermco Poly Deposition Furnace Training |
