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Deposited Nitride (LPCVD)

Deposited Silicon Nitride  (commonally called "nitride')is used as an isulator in traditional semiconductors, a masking layer or a stuctural layer in some mechanical applications.

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Equipment name & Badger ID Location Image Overview Materials Lab Supplied Link to Training
ThermcoNitride
thermconitride1
SNF Cleanroom Paul G Allen L107

Silicon nitride (or nitride or Si3N4) is deposited at moderately...

Thermco Nitride Deposition Furnace Training