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Furnaces

Annealing and Oxidation furnaces are long quartz tubes capable of holding several boats (or more) of wafers.  The boats typically hold 25 wafers.  The Furnaces operate from 250 to 1100c depending on the process.

 

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Equipment name & Badger ID Image Cleanliness Gases Substrate Size Process Temperature Range Material Thickness Range Maximum Load Notes
Thermco1
thermco1
Clean
700 °C - 1100 °C
25 Å - 2 μm
50

Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.

Thermco3
thermco 3
Clean
700 °C - 1100 °C
25 Å - 2 μm
50

Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.

Thermco4
thermco4
Flexible
700 °C - 1100 °C
25 Å - 2 μm
50

Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.

Thermolyne
thermolyne
Flexible
25 °C - 1000 °C
25
Tylan9
tylan9
Flexible
250 °C - 1100 °C
50

Any material that won't vaporize is okay. N2 and Ar annealing available.

Tylanfga
tylanfga
Semiclean
250 °C - 800 °C
100 Å - 100 Å
50

For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information.