Furnaces
Annealing and Oxidation furnaces are long quartz tubes capable of holding several boats (or more) of wafers. The boats typically hold 25 wafers. The Furnaces operate from 250 to 1100c depending on the process.
| Equipment name & Badger ID | Image | Cleanliness | Gases | Substrate Size | Process Temperature Range | Material Thickness Range | Maximum Load | Notes |
|---|---|---|---|---|---|---|---|---|
|
Thermco1 thermco1 |
 |
Clean |
700 °C - 1100 °C
|
25 Å -
2 μm
|
50 |
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available. |
||
|
Thermco3 thermco 3 |
 |
Clean |
700 °C - 1100 °C
|
25 Å -
2 μm
|
50 |
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available. |
||
|
Thermco4 thermco4 |
 |
Flexible |
700 °C - 1100 °C
|
25 Å -
2 μm
|
50 |
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available. |
||
|
Thermolyne thermolyne |
 |
Flexible |
25 °C - 1000 °C
|
|
25 | |||
|
Tylan9 tylan9 |
 |
Flexible |
250 °C - 1100 °C
|
|
50 |
Any material that won't vaporize is okay. N2 and Ar annealing available. |
||
|
Tylanfga tylanfga |
 |
Semiclean |
250 °C - 800 °C
|
100 Å -
100 Å
|
50 |
For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information. |
