Furnaces
Annealing and Oxidation furnaces are long quartz tubes capable of holding several boats (or more) of wafers. The boats typically hold 25 wafers. The Furnaces operate from 250 to 1100c depending on the process.
Annealing and Oxidation furnaces are long quartz tubes capable of holding several boats (or more) of wafers. The boats typically hold 25 wafers. The Furnaces operate from 250 to 1100c depending on the process.
