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KJL Evaporator (KJL)

Overview

[photo] KJL evaporator

We have a KJ Lesker e-gun/beam evaporator available in the Nanopatterning Cleanroom  (Spilker 006). Key features: Load-lock for cleanliness and faster pump down times (5-10 minutes per wafer) Up to a single 6 inch wafer can be inserted into the deposition chamber. Smaller pieces and wafer fragments can also be mounted on the water cooled substrate puck. An Ar ion source for cleaning the substrate immediately prior to metal deposition. A substrate to e-gun source distance of 24 inches which reduces side wall accumulation for better liftoff results. The substrate holder has tilt control which permits depositing materials at angles other than 90 degrees. We allow gold (Au) in the chamber. We allow wafers with patterned photo resists for lift-off processes. We are currently avoiding evaporating magnetic metals (Fe and Co) for the sake of users working with superconductors. It has 8 pockets for different materials. We currently have it stocked with: Ag, Al, Au, Cr, Cu, Ge, Ni, Pd, Pt, and Ti. We will consider introducing additional materials based on user demand. Please note that certain precious metals will be charged separately from the hourly usage of the instrument.

Capabilities and Specifications

Process Temperature Range: 
Notes: 

Spilker Engineering: SNSF membership required

Research Examples

Cross shaped patterns of metal sandwiching an oxide layer. The metal was deposited in the Lesker Evaporator.

Lines written by the JEOL e-beam lithography system. Metal was deposited and then a lift-off process was used to remove the metal from the regions where the e-beam resist remained.

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 

Steps to become a tool user

  1. The KJ Lesker Evaporator is located within the Nanopatterning Cleanroom at the basement of the Spilker Building. In order to get access to the tool, you must first follow and complete the procedure for gaining access the the Nanopatterning Cleanroom.
  2. Sign up for a training session. Check in periodically if all training sessions are full, or email kjl-evaporator-staff@lists.stanford.edu.
  3. If you are interested in using the argon ion mill attachment to the evaporator, email kjl-evaporator-staff@lists.stanford.edu to schedule a training session. Users should bring their own sample(s) with which they plan on doing a deposition for this training session. The normal training session is a prerequisite to the argon ion mill training.

Operating Instructions