Karl Suss MA-6 Contact Aligner 1 (karlsuss)
The Karl Suss MA-6 Contact Aligner system can perform precision mask-to-wafer front- or back-side alignment and near-UV photoresist exposure in hard- and soft- contact, as well as high and low vacuum contact; proximity is not available. Our current configuration accommodates 3", 4" and 6" wafers and pieces. SNF has two MA-6 aligners (karlsuss and karlsuss2).
Capabilities and Specifications
Max Exposure Area:
5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch
Process Temperature Range:
1:1 Contact Aligner.
Backside align, including IR.
Lab Facility, Location, and Badger Information
Training and Maintenance
Steps to become a tool user
Read the relevant operating procedures:
Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists
. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Follow the instructions on this form: SNF Training Shadowing Form