Innotec Evaporator (Innotec)
Overview
Innotec is an E-beam metal evaporation system, capable of depositing either single or multiple metallic thin films. Evaporation is a directional process and hence very good for lift-off applications. Innotec allows precisely controlled film thickness for films up to 1μm in thickness. Innotec is classified as gold contaminated. Many sources are available for film deposition including (but not limited to): Au, Cu, Cr, Pt, Ag, and Si (full list in Innotec Process Capabilities). Precious metals (Au, Pd, Pt) thickness must be below 200nm if using SNF metals. In general, evaporated films have worse adhesion to the substrate than sputtered films.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Lab Supplied Materials
User Supplied Materials
Substrate Type
Substrate Sizes
Maximum Load:
22 four inch wafers
Notes:
Precious metals limit is <200nm
Lab Organization, Location, and Badger Information
Lab Organization:
Location:
Badger Area:
SNF: Metallization
Badger ID:
Innotec
Training and Maintenance
Lab Facility:
Training Charges:
6.00 hours
Primary Trainer:
Primary Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Contact the primary trainer: Alex Denton
