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Innotec Evaporator (Innotec)

Overview

Innotec is an E-beam metal evaporation system, capable of depositing either single or multiple metallic thin films. Evaporation is a directional process and hence very good for lift-off applications. Innotec allows precisely controlled film thickness for films up to 1μm in thickness. Innotec is classified as gold contaminated. Many sources are available for film deposition including (but not limited to): Au, Cu, Cr, Pt, Ag, and Si (full list in Innotec Process Capabilities). Precious metals (Au, Pd, Pt) thickness must be below 200nm if using SNF metals. In general, evaporated films have worse adhesion to the substrate than sputtered films.

Cleanliness: 

Capabilities and Specifications

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Training Charges: 
6.00 hours
Primary Trainer: 
Primary Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  3. Contact the primary trainer: .

Operating Instructions