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Fiji 1 (fiji1)

Overview

photo of Fiji1 in SNF Cleanroom

Fiji1 is a load-locked, plasma-enabled atomic layer deposition (ALD) system. Coupled with Fiji2, Fiji1 is a Fiji F202 system from Cambridge Nanotech and is used for plasma assisted ALD of various dielectric and metallic films. The system can accommodate pieces up to an 8" wafer. Fiji1 is currently classified as CMOS restricted.

Cleanliness: 

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Training Charges: 
3.00 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the Fiji1 and Fiji2 In-depth materials:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. If you have trouble finding someone, please contact the trainer.
  3. Written Quiz. After shadowing a user, contact the primary trainer to take the short written quiz for the Fiji1/2. The quiz is closed book and all the information should be known to a someone who has studied the online documentation and has gone through a shadowing.
  4. Oral Qualification Exam. After the written quiz has been passed, you may schedule a final oral qualification exam with the primary trainer or a superuser.  At this exam you are expected to demonstrate your ability to run the tool safely and appropriately without any input.  Once this final stage is satisfactorily passed, you will be given full access and utilization for the Fiji1 and Fiji2 as an operator.