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Fabrication

The nanolabs at Stanford have a wide range of fabrication equipment available for researchers. Each grouping on the left is by type of processing. 

Partial words okay.
Equipment name & Badger ID Training Required & Charges Locationsort descending
Ex Fab Solvent Wet Bench
wbexfab_solv
WbExfab_Solv Training
0.50 hours
SNF Exfab Paul G Allen 104 Stinson
Heidelberg MLA 150
heidelberg
Heidelberg Training
2.00 hours
SNF Exfab Paul G Allen 104 Stinson
HMDS Vapor Prime Oven, YES2
yes2
Exfab YES2 HMDS oven training
0.00 hours
SNF Exfab Paul G Allen 104 Stinson
Finetech Lambda
flipchipbonder
Flip Chip Bonder Training
1.00 hours
SNF Exfab Paul G Allen 104 Stinson
Headway 3 Manual Resist Spinner
headway3
Headway 3 Training
1.00 hours
SNF Exfab Paul G Allen 104 Stinson
Ex Fab Develop Wet Bench
wbexfab_dev
WbExfab_Dev Training
1.00 hours
SNF Exfab Paul G Allen 104 Stinson
Fiji 1
fiji1
Fiji 1 and 2 Training
3.00 hours
SNF Cleanroom Paul G Allen L107
STS Plasma Enhanced CVD
sts
STS Plasma Enhanced CVD Training
1.50 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Resist Strip
wbresstrip-1
Wet Bench Resist Strip
0.75 hours
SNF Cleanroom Paul G Allen L107
Matrix Plasma Resist Strip
matrix
Matrix Plasma Resist Strip Training
0.50 hours
SNF Cleanroom Paul G Allen L107
Blue M Oven
bluem
Blue M Oven Training
0.50 hours
SNF Cleanroom Paul G Allen L107
Innotec Evaporator
Innotec
Innotec Evaporator Training
6.00 hours
SNF Cleanroom Paul G Allen L107
PlasmaTherm Shuttlelock PECVD System
ccp-dep
PlasmaTherm Shuttlelock PECVD System Training
1.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res-hf
wbclean_res-hf
Wet Bench Clean Piranha/HF/Phosphoric Training
2.25 hours
SNF Cleanroom Paul G Allen L107
STS Deep RIE Etcher
stsetch
STS Deep RIE Etcher Training
1.00 hours
SNF Cleanroom Paul G Allen L107
110°C Oven
oven110
110°C Oven Training SNF Cleanroom Paul G Allen L107
Intlvac Evaporation
Intlvac_evap
Intlvac Evaporation Training
2.00 hours
SNF Cleanroom Paul G Allen L107
Heidelberg MLA 150 - 2
heidelberg2
Heidelberg Training
2.00 hours
SNF Cleanroom Paul G Allen L107
ThermcoLTO
thermcoLTO
Thermco LTO Deposition Furnace Training
3.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 4
wbflexcorr-4
Wet Bench Flexcorr 1and2 and 3and4 Training
2.25 hours
SNF Cleanroom Paul G Allen L107
Xactix Xenon Difluoride Etcher
xactix
Xactix Xenon Difluoride Etcher Training
0.50 hours
SNF Cleanroom Paul G Allen L107
90°C Oven
oven90
90°C Oven Training SNF Cleanroom Paul G Allen L107
Teos2
teos2
Teos Deposition Furnace Training
3.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents 1
wbflexsolv-1
Wet Bench Flexible Solvents 1 and 2 Training
0.50 hours
SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Deep Silicon Etcher
PT-DSE
Plasma Therm Versaline LL ICP Deep Silicon Etcher Training
1.50 hours
SNF Cleanroom Paul G Allen L107
Karl Suss MA-6 Contact Aligner 2
karlsuss2
Karl Suss MA-6 Contact Aligner 1 and 2 Training
1.50 hours
SNF Cleanroom Paul G Allen L107
SVG Resist Coat Track 2
svgcoat2
SVG Resist Coat Tracks 1 and 2 Training
1.25 hours
SNF Cleanroom Paul G Allen L107
Technics Asher
technics
Technics Asher Training
0.50 hours
SNF Cleanroom Paul G Allen L107
ThermcoNitride
thermconitride1
Thermco Nitride Deposition Furnace Training
3.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents 2
wbflexsolv-2
Wet Bench Flexible Solvents 1 and 2 Training
0.50 hours
SNF Cleanroom Paul G Allen L107
Oxford Dielectric Etcher
oxford-rie
Oxford Dielectric Etcher Training
1.00 hours
SNF Cleanroom Paul G Allen L107
Karl Suss MA-6 Contact Aligner 1
karlsuss
Karl Suss MA-6 Contact Aligner 1 and 2 Training
1.50 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Clean 2
wbclean-2
Wet Bench Clean 1 and 2 Training
2.25 hours
SNF Cleanroom Paul G Allen L107
Samco PC300 Plasma Etch System
samco
Samco Training
0.50 hours
SNF Cleanroom Paul G Allen L107
TylanBPSG
tylanbpsg
TylanBPSG Deposition Furnace Training
3.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Decontamination
wbdecon
Wet Bench Decontamination Training SNF Cleanroom Paul G Allen L107
Lam Research TCP 9400 Poly Etcher
lampoly
Lam Research TCP 9400 Poly Etcher Training
1.00 hours
SNF Cleanroom Paul G Allen L107
ASML PAS 5500/60 i-line Stepper
asml
ASML PAS 5500/60 i-line Stepper Training
4.00 hours
SNF Cleanroom Paul G Allen L107
SVG Develop Track 2
svgdev2
SVG Resist Develop tracks 1 and 2 Training
0.50 hours
SNF Cleanroom Paul G Allen L107
Lesker2 Sputter
lesker2-sputter
Lesker2 Sputter Training
1.00 hours
SNF Cleanroom Paul G Allen L107
ThermcoPoly1
thermcopoly1
Thermco Poly Deposition Furnace Training
3.00 hours
SNF Cleanroom Paul G Allen L107
Lithography Solvent Bench
lithosolv
Lithography Solvent Bench Training SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Dielectric Etcher
PT-Ox
Plasma Therm Versaline LL ICP Dielectric Etcher Training
1.50 hours
SNF Cleanroom Paul G Allen L107
EV Group Contact Aligner
evalign
EV Group Contact Aligner Training
1.50 hours
SNF Cleanroom Paul G Allen L107
AJA2 Evaporator
aja2-evap
AJA2 Evaporator
1.00 hours
SNF Cleanroom Paul G Allen L107
ThermcoPoly2
thermcopoly2
Thermco Poly Deposition Furnace Training
3.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res-piranha
wbclean_res-piranha
Wet Bench Clean Piranha/HF/Phosphoric Training
2.25 hours
SNF Cleanroom Paul G Allen L107
SVG Develop Track 1
svgdev
SVG Resist Develop tracks 1 and 2 Training
0.50 hours
SNF Cleanroom Paul G Allen L107
Thermco1
thermco1
Thermco Oxidation Furnaces Training
1.00 hours
SNF Cleanroom Paul G Allen L107
Fiji 2
fiji2
Fiji 1 and 2 Training
3.00 hours
SNF Cleanroom Paul G Allen L107
PlasmaTherm Versaline HDP CVD System
hdpcvd
PlasmaTherm Versaline HDP CVD System Training
1.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 3
wbflexcorr-3
Wet Bench Flexcorr 1and2 and 3and4 Training
2.25 hours
SNF Cleanroom Paul G Allen L107
Laurell Manual Resist Spinner
laurell-R
Laurell Manual Resist Spinner Training
1.00 hours
SNF Cleanroom Paul G Allen L107
Thermco3
thermco 3
Thermco Oxidation Furnaces Training
1.00 hours
SNF Cleanroom Paul G Allen L107
Fiji 3
fiji3
Fiji 3 Training
0.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res- hotphos
wbclean_res-hotphos
Wet Bench Clean Piranha/HF/Phosphoric Training
2.25 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents
wbflexsolv
Wet Bench Flexible Solvents 1 and 2 Training
0.50 hours
SNF Cleanroom Paul G Allen L107
EVG 101 Spray Coater
evgspraycoat
EVG 101 Spray Coater Training
1.50 hours
SNF Cleanroom Paul G Allen L107
Thermco4
thermco4
Thermco Oxidation Furnaces Training
1.00 hours
SNF Cleanroom Paul G Allen L107
AMAT P5000 Etcher
p5000etch
AMAT P5000 Etcher Training
1.00 hours
SNF Cleanroom Paul G Allen L107
MVD
mvd
MVD Training
3.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 1
wbflexcorr-1
Wet Bench Flexcorr 1and2 and 3and4 Training
2.25 hours
SNF Cleanroom Paul G Allen L107
Critical Point Dryer
cpd
Critical Point Dryer Training
2.00 hours
SNF Cleanroom Paul G Allen L107
SVG Resist Coat Track 1
svgcoat
SVG Resist Coat Tracks 1 and 2 Training
1.25 hours
SNF Cleanroom Paul G Allen L107
Savannah
savannah
Savannah Training
3.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Germanium
wbgen2
Wet Bench Germanium Training SNF Cleanroom Paul G Allen L107
Wet Bench Clean 1
wbclean-1
Wet Bench Clean 1 and 2 Training
2.25 hours
SNF Cleanroom Paul G Allen L107
Ebeam Process Wet Bench
wbebres
Ebeam Process Wet Bench Training SNF Cleanroom Paul G Allen L107
Headway Manual Resist Spinner
headway2
Headway Manual Resist Spinner Training
1.00 hours
SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 2
wbflexcorr-2
Wet Bench Flexcorr 1and2 and 3and4 Training
2.25 hours
SNF Cleanroom Paul G Allen L107
MRC Reactive Ion Etcher
mrc
MRC Reactive Ion Etcher Training
1.00 hours
SNF Cleanroom Paul G Allen L107
SPTS uetch vapor etch
uetch
SPTS uetch vapor etch Training
0.50 hours
SNF Cleanroom Paul G Allen L107
Oxford III-V etcher
Ox-35
Oxford III-V etcher Training
1.50 hours
SNF Cleanroom Paul G Allen L107
Wet Bench CMOS Metal (wbclean3)
wbclean3
Wet Bench CMOS Metal (wbclean3) Training SNF Cleanroom Paul G Allen L107
Drytek 100 Plasma Etcher
drytek2
Drytek 100 Plasma Etcher Training
1.00 hours
SNF Cleanroom Paul G Allen L107
Ultraviolet Photoresist Cure
uvcure
Ultraviolet Photoresist Cure Training SNF Cleanroom Paul G Allen L107
Wet Bench Miscellaneous
wbmiscres
Wet Bench Miscellaneous Photoresist Training SNF Cleanroom Paul G Allen L107
Gasonics Aura Asher
gasonics
Gasonics Aura Asher Training SNF Cleanroom Paul G Allen L107
HMDS Vapor Prime Oven, YES
yes
YES Prime Oven Training SNF Cleanroom Paul G Allen L107
EV Group Wafer Bonder
evbond
EV Group Wafer Bonder Training
4.00 hours
SNF Cleanroom Paul G Allen L107
Epi2
epi2
AMAT Centurion Epitaxial Training
4.00 hours
SNF Cleanroom Paul G Allen L107
Mask Scrubber
masksrub
Mask Scrubber Training SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Metal Etcher
PT-MTL
Plasma Therm Versaline LL ICP Metal Etcher Training
1.50 hours
SNF Cleanroom Paul G Allen L107
White Oven
white-oven
White Oven Training
0.50 hours
SNF Cleanroom Paul G Allen L107
DISCO Wafer Saw
DISCO wafersaw
DISCO wafersaw training
2.00 hours
SNF Exfab Paul G Allen 159 Capitola
DISCO Backgrinder
disco-backgrind
DISCO Backgrinder Training
2.00 hours
SNF Exfab Paul G Allen 159 Capitola
Thermolyne
thermolyne
Thermolyne Muffle Furnace Training SNF Exfab Paul G Allen 159 Capitola
GnP POLI-400L
cmp
CMP Training
1.50 hours
SNF Exfab Paul G Allen 159 Capitola
AJA Evaporator
aja-evap
AJA Evaporation training
1.00 hours
SNF Exfab Paul G Allen 155A Venice
Epilog Fusion M2 Laser Cutter
lasercutter
Lasercutter Training
1.00 hours
SNF Exfab Paul G Allen 155A Venice
Lesker Sputter
lesker-sputter
Lesker Sputter Training
1.00 hours
SNF Exfab Paul G Allen 155A Venice
First Nano carbon nanotube CVD furnace
cvd-nanotube
cvd-nanotube training
3.00 hours
SNF Exfab Paul G Allen L119 Año Nuevo
Aixtron Black Magic graphene CVD furnace
aixtron-graphene
Aixtron Black Magic graphene CVD furnace training
1.00 hours
SNF Exfab Paul G Allen L119 Año Nuevo
Aix-ccs
aix-ccs
Aixtron MOCVD - III-N system training
4.00 hours
SNF MOCVD Paul G Allen 213XA
Aix200
aix200
Aixtron MOCVD - III-V system training
4.00 hours
SNF MOCVD Paul G Allen 213XA
Glovebox-r
glovebox-r
Glovebox-r Training SNF Exfab Paul G Allen 155 Mavericks
Fujifilm Dimatix Ink Jet Printer
nanoinkjet
Dimatix Ink Jet Printer Training
7.00 hours
SNF Exfab Paul G Allen 155 Mavericks
Glovebox-l
glovebox-l
Glovebox-l Training SNF Exfab Paul G Allen 155 Mavericks
Fumehood 1
fumehood1
Fumehood 1 Training SNF Exfab Paul G Allen 155 Mavericks
Fumehood 2
fumehood2
Fumehood 2 Training
0.00 hours
SNF Exfab Paul G Allen 155 Mavericks
Fumehood 3
fumehood3
Fumehood 3 Training
0.00 hours
SNF Exfab Paul G Allen 155 Mavericks
Formlabs Form2 3D Printer
form2-3d-printer
Form2 3D Printer Training SNF Exfab Paul G Allen 155 Mavericks
Fisher Accuspin 24C
centrifuge
Centrifuge Training SNF Exfab Paul G Allen 155 Mavericks
Last modified: 30 Apr 2020