Fabrication

The nanolabs at Stanford have a wide range of fabrication equipment available for researchers. Each grouping on the left is by type of processing.

Technique

Equipment name & Badger ID	Training Required & Charges	Location
Ex Fab Solvent Wet Bench wbexfab_solv	WbExfab_Solv Training 0.50 hours	SNF Exfab Paul G Allen 104 Stinson
Heidelberg MLA 150 heidelberg	Heidelberg Training 2.00 hours	SNF Exfab Paul G Allen 104 Stinson
HMDS Vapor Prime Oven, YES2 yes2	Exfab YES2 HMDS oven training 0.00 hours	SNF Exfab Paul G Allen 104 Stinson
Finetech Lambda flipchipbonder	Flip Chip Bonder Training 1.00 hours	SNF Exfab Paul G Allen 104 Stinson
Headway 3 Manual Resist Spinner headway3	Headway 3 Training 1.00 hours	SNF Exfab Paul G Allen 104 Stinson
Ex Fab Develop Wet Bench wbexfab_dev	WbExfab_Dev Training 1.00 hours	SNF Exfab Paul G Allen 104 Stinson
Fiji 1 fiji1	Fiji 1 and 2 Training 3.00 hours	SNF Cleanroom Paul G Allen L107
STS Plasma Enhanced CVD sts	STS Plasma Enhanced CVD Training 1.50 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Resist Strip wbresstrip-1	Wet Bench Resist Strip 0.75 hours	SNF Cleanroom Paul G Allen L107
Matrix Plasma Resist Strip matrix	Matrix Plasma Resist Strip Training 0.50 hours	SNF Cleanroom Paul G Allen L107
Blue M Oven bluem	Blue M Oven Training 0.50 hours	SNF Cleanroom Paul G Allen L107
Innotec Evaporator Innotec	Innotec Evaporator Training 6.00 hours	SNF Cleanroom Paul G Allen L107
PlasmaTherm Shuttlelock PECVD System ccp-dep	PlasmaTherm Shuttlelock PECVD System Training 1.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res-hf wbclean_res-hf	Wet Bench Clean Piranha/HF/Phosphoric Training 2.25 hours	SNF Cleanroom Paul G Allen L107
STS Deep RIE Etcher stsetch	STS Deep RIE Etcher Training 1.00 hours	SNF Cleanroom Paul G Allen L107
110°C Oven oven110	110°C Oven Training	SNF Cleanroom Paul G Allen L107
Intlvac Evaporation Intlvac_evap	Intlvac Evaporation Training 2.00 hours	SNF Cleanroom Paul G Allen L107
Heidelberg MLA 150 - 2 heidelberg2	Heidelberg Training 2.00 hours	SNF Cleanroom Paul G Allen L107
ThermcoLTO thermcoLTO	Thermco LTO Deposition Furnace Training 3.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 4 wbflexcorr-4	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	SNF Cleanroom Paul G Allen L107
Xactix Xenon Difluoride Etcher xactix	Xactix Xenon Difluoride Etcher Training 0.50 hours	SNF Cleanroom Paul G Allen L107
90°C Oven oven90	90°C Oven Training	SNF Cleanroom Paul G Allen L107
Teos2 teos2	Teos Deposition Furnace Training 3.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents 1 wbflexsolv-1	Wet Bench Flexible Solvents 1 and 2 Training 0.50 hours	SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Deep Silicon Etcher PT-DSE	Plasma Therm Versaline LL ICP Deep Silicon Etcher Training 1.50 hours	SNF Cleanroom Paul G Allen L107
Karl Suss MA-6 Contact Aligner 2 karlsuss2	Karl Suss MA-6 Contact Aligner 1 and 2 Training 1.50 hours	SNF Cleanroom Paul G Allen L107
SVG Resist Coat Track 2 svgcoat2	SVG Resist Coat Tracks 1 and 2 Training 1.25 hours	SNF Cleanroom Paul G Allen L107
Technics Asher technics	Technics Asher Training 0.50 hours	SNF Cleanroom Paul G Allen L107
ThermcoNitride thermconitride1	Thermco Nitride Deposition Furnace Training 3.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents 2 wbflexsolv-2	Wet Bench Flexible Solvents 1 and 2 Training 0.50 hours	SNF Cleanroom Paul G Allen L107
Oxford Dielectric Etcher oxford-rie	Oxford Dielectric Etcher Training 1.00 hours	SNF Cleanroom Paul G Allen L107
Karl Suss MA-6 Contact Aligner 1 karlsuss	Karl Suss MA-6 Contact Aligner 1 and 2 Training 1.50 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Clean 2 wbclean-2	Wet Bench Clean 1 and 2 Training 2.25 hours	SNF Cleanroom Paul G Allen L107
Samco PC300 Plasma Etch System samco	Samco Training 0.50 hours	SNF Cleanroom Paul G Allen L107
TylanBPSG tylanbpsg	TylanBPSG Deposition Furnace Training 3.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Decontamination wbdecon	Wet Bench Decontamination Training	SNF Cleanroom Paul G Allen L107
Lam Research TCP 9400 Poly Etcher lampoly	Lam Research TCP 9400 Poly Etcher Training 1.00 hours	SNF Cleanroom Paul G Allen L107
ASML PAS 5500/60 i-line Stepper asml	ASML PAS 5500/60 i-line Stepper Training 4.00 hours	SNF Cleanroom Paul G Allen L107
SVG Develop Track 2 svgdev2	SVG Resist Develop tracks 1 and 2 Training 0.50 hours	SNF Cleanroom Paul G Allen L107
Lesker2 Sputter lesker2-sputter	Lesker2 Sputter Training 1.00 hours	SNF Cleanroom Paul G Allen L107
ThermcoPoly1 thermcopoly1	Thermco Poly Deposition Furnace Training 3.00 hours	SNF Cleanroom Paul G Allen L107
Lithography Solvent Bench lithosolv	Lithography Solvent Bench Training	SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Dielectric Etcher PT-Ox	Plasma Therm Versaline LL ICP Dielectric Etcher Training 1.50 hours	SNF Cleanroom Paul G Allen L107
EV Group Contact Aligner evalign	EV Group Contact Aligner Training 1.50 hours	SNF Cleanroom Paul G Allen L107
AJA2 Evaporator aja2-evap	AJA2 Evaporator 1.00 hours	SNF Cleanroom Paul G Allen L107
ThermcoPoly2 thermcopoly2	Thermco Poly Deposition Furnace Training 3.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res-piranha wbclean_res-piranha	Wet Bench Clean Piranha/HF/Phosphoric Training 2.25 hours	SNF Cleanroom Paul G Allen L107
SVG Develop Track 1 svgdev	SVG Resist Develop tracks 1 and 2 Training 0.50 hours	SNF Cleanroom Paul G Allen L107
Thermco1 thermco1	Thermco Oxidation Furnaces Training 1.00 hours	SNF Cleanroom Paul G Allen L107
Fiji 2 fiji2	Fiji 1 and 2 Training 3.00 hours	SNF Cleanroom Paul G Allen L107
PlasmaTherm Versaline HDP CVD System hdpcvd	PlasmaTherm Versaline HDP CVD System Training 1.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 3 wbflexcorr-3	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	SNF Cleanroom Paul G Allen L107
Laurell Manual Resist Spinner laurell-R	Laurell Manual Resist Spinner Training 1.00 hours	SNF Cleanroom Paul G Allen L107
Thermco3 thermco 3	Thermco Oxidation Furnaces Training 1.00 hours	SNF Cleanroom Paul G Allen L107
Fiji 3 fiji3	Fiji 3 Training 0.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res- hotphos wbclean_res-hotphos	Wet Bench Clean Piranha/HF/Phosphoric Training 2.25 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents wbflexsolv	Wet Bench Flexible Solvents 1 and 2 Training 0.50 hours	SNF Cleanroom Paul G Allen L107
EVG 101 Spray Coater evgspraycoat	EVG 101 Spray Coater Training 1.50 hours	SNF Cleanroom Paul G Allen L107
Thermco4 thermco4	Thermco Oxidation Furnaces Training 1.00 hours	SNF Cleanroom Paul G Allen L107
AMAT P5000 Etcher p5000etch	AMAT P5000 Etcher Training 1.00 hours	SNF Cleanroom Paul G Allen L107
MVD mvd	MVD Training 3.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 1 wbflexcorr-1	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	SNF Cleanroom Paul G Allen L107
Critical Point Dryer cpd	Critical Point Dryer Training 2.00 hours	SNF Cleanroom Paul G Allen L107
SVG Resist Coat Track 1 svgcoat	SVG Resist Coat Tracks 1 and 2 Training 1.25 hours	SNF Cleanroom Paul G Allen L107
Savannah savannah	Savannah Training 3.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Germanium wbgen2	Wet Bench Germanium Training	SNF Cleanroom Paul G Allen L107
Wet Bench Clean 1 wbclean-1	Wet Bench Clean 1 and 2 Training 2.25 hours	SNF Cleanroom Paul G Allen L107
Ebeam Process Wet Bench wbebres	Ebeam Process Wet Bench Training	SNF Cleanroom Paul G Allen L107
Headway Manual Resist Spinner headway2	Headway Manual Resist Spinner Training 1.00 hours	SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 2 wbflexcorr-2	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	SNF Cleanroom Paul G Allen L107
MRC Reactive Ion Etcher mrc	MRC Reactive Ion Etcher Training 1.00 hours	SNF Cleanroom Paul G Allen L107
SPTS uetch vapor etch uetch	SPTS uetch vapor etch Training 0.50 hours	SNF Cleanroom Paul G Allen L107
Oxford III-V etcher Ox-35	Oxford III-V etcher Training 1.50 hours	SNF Cleanroom Paul G Allen L107
Wet Bench CMOS Metal (wbclean3) wbclean3	Wet Bench CMOS Metal (wbclean3) Training	SNF Cleanroom Paul G Allen L107
Drytek 100 Plasma Etcher drytek2	Drytek 100 Plasma Etcher Training 1.00 hours	SNF Cleanroom Paul G Allen L107
Ultraviolet Photoresist Cure uvcure	Ultraviolet Photoresist Cure Training	SNF Cleanroom Paul G Allen L107
Wet Bench Miscellaneous wbmiscres	Wet Bench Miscellaneous Photoresist Training	SNF Cleanroom Paul G Allen L107
Gasonics Aura Asher gasonics	Gasonics Aura Asher Training	SNF Cleanroom Paul G Allen L107
HMDS Vapor Prime Oven, YES yes	YES Prime Oven Training	SNF Cleanroom Paul G Allen L107
EV Group Wafer Bonder evbond	EV Group Wafer Bonder Training 4.00 hours	SNF Cleanroom Paul G Allen L107
Epi2 epi2	AMAT Centurion Epitaxial Training 4.00 hours	SNF Cleanroom Paul G Allen L107
Mask Scrubber masksrub	Mask Scrubber Training	SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Metal Etcher PT-MTL	Plasma Therm Versaline LL ICP Metal Etcher Training 1.50 hours	SNF Cleanroom Paul G Allen L107
White Oven white-oven	White Oven Training 0.50 hours	SNF Cleanroom Paul G Allen L107
DISCO Wafer Saw DISCO wafersaw	DISCO wafersaw training 2.00 hours	SNF Exfab Paul G Allen 159 Capitola
DISCO Backgrinder disco-backgrind	DISCO Backgrinder Training 2.00 hours	SNF Exfab Paul G Allen 159 Capitola
Thermolyne thermolyne	Thermolyne Muffle Furnace Training	SNF Exfab Paul G Allen 159 Capitola
GnP POLI-400L cmp	CMP Training 1.50 hours	SNF Exfab Paul G Allen 159 Capitola
AJA Evaporator aja-evap	AJA Evaporation training 1.00 hours	SNF Exfab Paul G Allen 155A Venice
Epilog Fusion M2 Laser Cutter lasercutter	Lasercutter Training 1.00 hours	SNF Exfab Paul G Allen 155A Venice
Lesker Sputter lesker-sputter	Lesker Sputter Training 1.00 hours	SNF Exfab Paul G Allen 155A Venice
First Nano carbon nanotube CVD furnace cvd-nanotube	cvd-nanotube training 3.00 hours	SNF Exfab Paul G Allen L119 Año Nuevo
Aixtron Black Magic graphene CVD furnace aixtron-graphene	Aixtron Black Magic graphene CVD furnace training 1.00 hours	SNF Exfab Paul G Allen L119 Año Nuevo
Aix-ccs aix-ccs	Aixtron MOCVD - III-N system training 4.00 hours	SNF MOCVD Paul G Allen 213XA
Aix200 aix200	Aixtron MOCVD - III-V system training 4.00 hours	SNF MOCVD Paul G Allen 213XA
Glovebox-r glovebox-r	Glovebox-r Training	SNF Exfab Paul G Allen 155 Mavericks
Fujifilm Dimatix Ink Jet Printer nanoinkjet	Dimatix Ink Jet Printer Training 7.00 hours	SNF Exfab Paul G Allen 155 Mavericks
Glovebox-l glovebox-l	Glovebox-l Training	SNF Exfab Paul G Allen 155 Mavericks
Fumehood 1 fumehood1	Fumehood 1 Training	SNF Exfab Paul G Allen 155 Mavericks
Fumehood 2 fumehood2	Fumehood 2 Training 0.00 hours	SNF Exfab Paul G Allen 155 Mavericks
Fumehood 3 fumehood3	Fumehood 3 Training 0.00 hours	SNF Exfab Paul G Allen 155 Mavericks
Formlabs Form2 3D Printer form2-3d-printer	Form2 3D Printer Training	SNF Exfab Paul G Allen 155 Mavericks
Fisher Accuspin 24C centrifuge	Centrifuge Training	SNF Exfab Paul G Allen 155 Mavericks

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Last modified: 30 Apr 2020

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Equipment

Fabrication