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Fabrication

The nanolabs at Stanford have a wide range of fabrication equipment available for researchers. Each grouping on the left is by type of processing. 

Partial words okay.
Equipment name & Badger ID Training Required & Charges Parent Lab Organization Lab Organization Location
110°C Oven
oven110
110°C Oven Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
90°C Oven
oven90
90°C Oven Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Aix-ccs
aix-ccs
Aixtron MOCVD - III-N system training
4.00 hours
SNF
SNF MOCVD SNF MOCVD Paul G Allen 213XA
Aix200
aix200
Aixtron MOCVD - III-V system training
4.00 hours
SNF
SNF MOCVD SNF MOCVD Paul G Allen 213XA
Aixtron Black Magic graphene CVD furnace
aixtron-graphene
Aixtron Black Magic graphene CVD furnace training
1.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen L119 Año Nuevo
AJA Evaporator
aja-evap
AJA Evaporation training
1.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 155A Venice
AJA2 Evaporator
aja2-evap
AJA2 Evaporator
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
AMAT P5000 Etcher
p5000etch
AMAT P5000 Etcher Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
AMT Oxide Plasma Etcher
amtetcher
AMT Oxide Plasma Etcher Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
ASML PAS 5500/60 i-line Stepper
asml
ASML PAS 5500/60 i-line Stepper Training
4.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Blue M Oven
bluem
Blue M Oven Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Critical Point Dryer
cpd
Critical Point Dryer Training
2.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
DISCO Backgrinder
disco-backgrind
DISCO Backgrinder Training
3.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 159 Capitola
DISCO Wafer Saw
DISCO wafersaw
DISCO wafersaw training
2.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 159 Capitola
Drytek 100 Plasma Etcher
drytek2
Drytek 100 Plasma Etcher Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Ebeam Process Wet Bench
wbebres
Ebeam Process Wet Bench Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Epi2
epi2
AMAT Centurion Epitaxial Training
4.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Epilog Fusion M2 Laser Cutter
lasercutter
Lasercutter Training
1.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 155A Venice
EV Group Contact Aligner
evalign
EV Group Contact Aligner Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
EV Group Wafer Bonder
evbond
EV Group Wafer Bonder Training
4.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
EVG 101 Spray Coater
evgspraycoat
EVG 101 Spray Coater Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Ex Fab Develop Wet Bench
wbexfab_dev
WbExfab_Dev Training
1.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 104 Stinson
Ex Fab Solvent Wet Bench
wbexfab_solv
WbExfab_Solv Training
1.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 104 Stinson
Fiji 1
fiji1
Fiji 1 and 2 Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Fiji 2
fiji2
Fiji 1 and 2 Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Fiji 3
fiji3
Fiji 3 Training
0.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Finetech Lambda
flipchipbonder
Flip Chip Bonder Training
1.00 hours
SNF
SNF SNF Exfab Paul G Allen 104 Stinson
First Nano carbon nanotube CVD furnace
cvd-nanotube
cvd-nanotube training
3.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen L119 Año Nuevo
Fisher Accuspin 24C
centrifuge
Centrifuge Training
SNF
SNF Exfab SNF Exfab Paul G Allen 155 Mavericks
Formlabs Form2 3D Printer
form2-3d-printer
Form2 3D Printer Training
SNF
SNF Exfab SNF Exfab Paul G Allen 155 Mavericks
Fujifilm Dimatix Ink Jet Printer
nanoinkjet
Dimatix Ink Jet Printer Training
7.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 155 Mavericks
Fumehood 1
fumehood1
Fumehood 1 Training
SNF
SNF SNF Exfab Paul G Allen 155 Mavericks
Fumehood 2
fumehood2
Fumehood 2 Training
0.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 155 Mavericks
Fumehood 3
fumehood3
Fumehood 3 Training
0.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 155 Mavericks
Gasonics Aura Asher
gasonics
Gasonics Aura Asher Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Glovebox-l
glovebox-l
Glovebox-l Training
SNF
SNF Exfab SNF Exfab Paul G Allen 155 Mavericks
Glovebox-r
glovebox-r
Glovebox-r Training
SNF
SNF Exfab SNF Exfab Paul G Allen 155 Mavericks
GnP POLI-400L
cmp
CMP Training
1.50 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 159 Capitola
Headway 3 Manual Resist Spinner
headway3
Headway 3 Training
SNF
SNF Exfab SNF Exfab Paul G Allen 104 Stinson
Headway Manual Resist Spinner
headway2
Headway Manual Resist Spinner Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Heidelberg MLA 150
heidelberg
Heidelberg Training
2.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 104 Stinson
Heidelberg MLA 150 - 2
heidelberg2
Heidelberg Training
2.00 hours
SNF
SNF Exfab SNF Cleanroom Paul G Allen L107
HMDS Vapor Prime Oven, YES
yes
YES Prime Oven Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
HMDS Vapor Prime Oven, YES2
yes2
Exfab YES2 HMDS oven training
0.00 hours
SNF
SNF Exfab SNF Exfab Paul G Allen 104 Stinson
Innotec Evaporator
Innotec
Innotec Evaporator Training
6.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Intlvac Evaporation
Intlvac_evap
Intlvac Evaporation Training
2.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Karl Suss MA-6 Contact Aligner 1
karlsuss
Karl Suss MA-6 Contact Aligner 1 and 2 Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Karl Suss MA-6 Contact Aligner 2
karlsuss2
Karl Suss MA-6 Contact Aligner 1 and 2 Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Lam Research TCP 9400 Poly Etcher
lampoly
Lam Research TCP 9400 Poly Etcher Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Laurell Manual Resist Spinner
laurell-R
Laurell Manual Resist Spinner Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Lesker Sputter
lesker-sputter
Lesker Sputter Training
1.00 hours
Mavericks (Room 155) SNF Exfab Paul G Allen 155A Venice
Lesker2 Sputter
lesker2-sputter
Lesker2 Sputter Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Lithography Solvent Bench
lithosolv
Lithography Solvent Bench Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Mask Scrubber
masksrub
Mask Scrubber Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Matrix Plasma Resist Strip
matrix
Matrix Plasma Resist Strip Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Metalica Sputter
metalica
Metalica Sputter Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
MFS Large Evaporator
MFS Large
MFS Large Training SNSF
MFS Small Evaporator
MFS Small
MFS Small Training SNSF
MRC Reactive Ion Etcher
mrc
MRC Reactive Ion Etcher Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
MVD
mvd
MVD Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Oerlikon Leybold Sputter Oerlikon Leybold Univex 400 RF/DC Sputter Station Training SNSF
Oxford Dielectric Etcher
oxford-rie
Oxford Dielectric Etcher Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Oxford III-V etcher
Ox-35
Oxford III-V etcher Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Deep Silicon Etcher
PT-DSE
Plasma Therm Versaline LL ICP Deep Silicon Etcher Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Dielectric Etcher
PT-Ox
Plasma Therm Versaline LL ICP Dielectric Etcher Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Metal Etcher
PT-MTL
Plasma Therm Versaline LL ICP Metal Etcher Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
PlasmaTherm Shuttlelock PECVD System
ccp-dep
PlasmaTherm Shuttlelock PECVD System Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
PlasmaTherm Versaline HDP CVD System
hdpcvd
PlasmaTherm Versaline HDP CVD System Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Samco PC300 Plasma Etch System
samco
Samco Training
0.50 hours
SNF
SNF SNF Cleanroom Paul G Allen L107
Savannah
savannah
Savannah Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
SPTS uetch vapor etch
uetch
SPTS uetch vapor etch Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
STS Deep RIE Etcher
stsetch
STS Deep RIE Etcher Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
STS Plasma Enhanced CVD
sts
STS Plasma Enhanced CVD Training
1.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
SVG Develop Track 1
svgdev
SVG Resist Develop tracks 1 and 2 Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
SVG Develop Track 2
svgdev2
SVG Resist Develop tracks 1 and 2 Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
SVG Resist Coat Track 1
svgcoat
SVG Resist Coat Tracks 1 and 2 Training
1.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
SVG Resist Coat Track 2
svgcoat2
SVG Resist Coat Tracks 1 and 2 Training
1.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Technics Asher
technics
Technics Asher Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Teos2
teos2
Teos Deposition Furnace Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Thermco1
thermco1
Thermco Oxidation Furnaces Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Thermco3
thermco 3
Thermco Oxidation Furnaces Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Thermco4
thermco4
Thermco Oxidation Furnaces Training
1.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
ThermcoLTO
thermcoLTO
Thermco LTO Deposition Furnace Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
ThermcoNitride
thermconitride1
Thermco Nitride Deposition Furnace Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
ThermcoPoly1
thermcopoly1
Thermco Poly Deposition Furnace Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
ThermcoPoly2
thermcopoly2
Thermco Poly Deposition Furnace Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Thermolyne
thermolyne
Thermolyne Muffle Furnace Training
SNF
SNF SNF Exfab Paul G Allen 159 Capitola
TylanBPSG
tylanbpsg
TylanBPSG Deposition Furnace Training
3.00 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Ultraviolet Photoresist Cure
uvcure
Ultraviolet Photoresist Cure Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Clean 1
wbclean-1
Wet Bench Clean 1 and 2 Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Clean 2
wbclean-2
Wet Bench Clean 1 and 2 Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res- hotphos
wbclean_res-hotphos
Wet Bench Clean Piranha/HF/Phosphoric Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res-hf
wbclean_res-hf
Wet Bench Clean Piranha/HF/Phosphoric Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res-piranha
wbclean_res-piranha
Wet Bench Clean Piranha/HF/Phosphoric Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench CMOS Metal (wbclean3)
wbclean3
Wet Bench CMOS Metal (wbclean3) Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Decontamination
wbdecon
Wet Bench Decontamination Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 1
wbflexcorr-1
Wet Bench Flexcorr 1and2 and 3and4 Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 2
wbflexcorr-2
Wet Bench Flexcorr 1and2 and 3and4 Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 3
wbflexcorr-3
Wet Bench Flexcorr 1and2 and 3and4 Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 4
wbflexcorr-4
Wet Bench Flexcorr 1and2 and 3and4 Training
2.25 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents
wbflexsolv
Wet Bench Flexible Solvents 1 and 2 Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents 1
wbflexsolv-1
Wet Bench Flexible Solvents 1 and 2 Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents 2
wbflexsolv-2
Wet Bench Flexible Solvents 1 and 2 Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Germanium
wbgen2
Wet Bench Germanium Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Wet Bench Miscellaneous
wbmiscres
Wet Bench Miscellaneous Photoresist Training
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
White Oven
white-oven
White Oven Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Xactix Xenon Difluoride Etcher
xactix
Xactix Xenon Difluoride Etcher Training
0.50 hours
SNF
SNF Cleanroom SNF Cleanroom Paul G Allen L107
Last modified: 30 Apr 2020