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EV Group Wafer Bonder (evbond)

Overview

The Electronic Visions system is comprised of the precision optical 620 Aligner and the 501 Wafer Bonder. The Bonder module includes a Megasonic Clean station for ultrasonic cleaning of wafers before alignment. Using the specially provided bond tool, wafers to be bonded are aligned on the 620 Aligner and then placed in the 501 Bonder for processing. Although primarily used for anodic bonding, the 501 Bonder is compatible with several other bonding modes, including: compression, direct Si-Si, low temperature eutectic/frit bonding. Our current configuration accommodates 100 mm round wafers and pieces.

Cleanliness: 

Processing Technique(s)

Capabilities and Specifications

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Training Charges: 
4.00 hours
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  3. Sign up for the relevant training scheduled in .
  4. Contact the primary trainer: .

Operating Instructions