SNF is open under New Normal Rules. ANY shadowing must be coordinated with SNF staff first.
Epi2 is the the first chamber on the tool and is referred to as Chamber A in most Epi communications.
N and P doping available- intrinsic to 5E19 Operating pressure range is 5-300Torr
Equipment name & Badger ID | Cleanliness | Cleaning Required | Gases | Substrate Size | Process Temperature Range | Maximum Load (number of wafers) | Notes |
---|---|---|---|---|---|---|---|
Epi2 epi2 |
Clean | Pre-Diffusion Clean |
600 °C - 1200 °C
|
1 |
N and P doping available- intrinsic to 5E19 Operating pressure range is 5-300Torr |
||
ThermcoLTO thermcoLTO |
Flexible |
300 °C - 450 °C
|
26 |
limits on material vapor pressure |
|||
ThermcoPoly1 thermcopoly1 |
Clean | Pre-Diffusion Clean |
525 °C - 650 °C
|
44 |
Standard polysilicon deposition at 620C. P and N doping available. Amorphous Si programs available. |
||
ThermcoPoly2 thermcopoly2 |
Flexible | Pre-Diffusion Clean |
525 °C - 650 °C
|
44 |
Standard polysilicon deposition at 620C. P and N doping available. |
||
TylanBPSG tylanbpsg |
Clean, Semiclean | Pre-Diffusion Clean, Standard Metal Clean |
300 °C - 450 °C
|
26 |