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Ebeam Process Wet Bench (wbebres)

Cleanliness: 
Flexible

Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
Notes: 

Manual developing of Ebeam resist

Lab Facility, Location, and Badger Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
Badger Area: 
SNF: Photolithography
Badger ID: 
wbebres

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Primary Maintenance: 
Gary Sosa
Backup Maintenance: 
Mario Vilanova

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Contact the primary trainer:
    .