Skip to content Skip to navigation

Ebeam Process Wet Bench (wbebres)


Capabilities and Specifications

Process Temperature Range: 

Manual developing of Ebeam resist

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Read more here: All Litho class.
  2. Contact the primary trainer: