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Ebeam Process Wet Bench (wbebres)

Cleanliness: 

Capabilities and Specifications

Process Temperature Range: 
Notes: 

Manual developing of Ebeam resist

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Read more here: All Litho class.
  2. Contact the primary trainer:
    .