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AMT Oxide Plasma Etcher (amtetcher)


photo of AMT etcher in SNF cleanroom
Reactive Ion Etcher for Oxides or Nitrides.  Also can be used for Si trench etching.

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 

Batch processing tool with hexode configuration; pieces need to be mounted on a carrier wafer for etching

Lab Facility, Location, and Badger Information

Training and Maintenance

photo of amt etcher in SNF cleanroom
Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Check the training calendar for any scheduled training:.
  2. Contact the primary trainer, , to sign up for the training or to schedule a training if none is scheduled.
  3. Read the relevant operating procedures:
  4. Get qualified by either attending the training or submitting the shadowing form.