Alphastep 500 Profilometer (alphastep)
The Tencor Alphastep 500 is a stylus-based surface profiler to measure step heights of surfaces. A stylus is placed in contact with, and then gently dragged along the surface of the substrate. The vertical deflection measures the change in step height. Step height measurements from 500 Angstroms to 300 µm.
Capabilities and Specifications
Process Temperature Range:
Lab Facility, Location, and Badger Information
Training and Maintenance
Steps to become a tool user
Read the relevant operating procedures:
Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists
. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Follow the instructions on this form: SNF Training Shadowing Form