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Function and Method(s):
Metal-Organic (MO) CVD
Equipment Used:
Aixtron MOCVD - III-N system (aix-ccs)
MOCVD Regrown Ohmic Contacts to AlGaN/GaN Heterostructures- Final Report
PDF File:
MOCVD Regrown Ohmic Contacts to AlGaN/GaN Heterostructures
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Materials
III-N materials (III-N materials)
Thursday, August 10, 2023
