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Function and Method(s):
Metal-Organic (MO) CVD
Equipment Used:
Aixtron MOCVD - III-N system (aix-ccs)
Oxford III-V etcher (Ox-35)
Community Service P-GaN/AlGAN/GaN E-mode HEMT Project Proposal
P-GaN/AlGAN/GaN E-mode HEMT Project Proposal
PDF File:
P-GaN/AlGAN/GaN E-mode HEMT Project Proposal
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Materials
Aluminum Gallium Nitride (AlGaN)
III-N materials (III-N materials)
Gallium Nitride (GaN)
Thursday, August 10, 2023
