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Equipment name & Badger IDsort descending Training Required & Charges Cleanliness Location Chemicals Notes
Headway Manual Resist Spinner
Resist Coat (manual) Headway Manual Training
1.00 hours
SNF Cleanroom Paul G Allen L107

Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists

SVG Resist Coat Track 2
SVG Resist Coat Tracks 1 and 2 Training
1.25 hours
SNF Cleanroom Paul G Allen L107

Automatic HMDS, Resist spinning, and Bake. AZ5214IR Image Reversal.

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