85% Phosphoric Acid
Chemical Formula:
H3PO4
Full Chemical Name (for In-Use Hazardous Chemicals card):
Phosphoric Acid
Phosphoric acid is an etchant that has traditionally been used for nitride etches.
| Equipment name & Badger ID | Training Required & Charges | Cleanliness |
Location |
Chemicals | Notes |
|---|---|---|---|---|---|
|
Wet Bench Flexcorr 1 wbflexcorr-1 |
Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours |
SNF Cleanroom Paul G Allen L107 |
Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only. |
||
|
Wet Bench Clean_res- hotphos wbclean_res-hotphos |
Wet Bench Clean Piranha/HF/Phosphoric Training 2.25 hours |
SNF Cleanroom Paul G Allen L107 |
Resist should have been removed |
