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Equipment Summary (archive)

A listing of all SNF, MOCVD, and ExFab equipment, its name, equipment group, staff in charge, location, and Training hours.  Please note that the terms nSiL and ExFab are used interchangeably.  ExFab lab was called nSiL years ago, and can still be found in the nSiL Badger tab.

Tools labeled as located in SNSF are NOT part of the SNF lab spaces in the Allen building.  They are part of the SNSF facility, which are nano characterization and fabrication labs located in other buildings, and you must be a labmember there to use those tools.   

Electron Beam Writer

Badger Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
raith Raith 150 Electron Beam Writer All Swaroop Swaroop SNF 12 (a)

 

Optical Photolithography: Resist Coat, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
headway2 Headway Manual Resist Spinner All Phil Mario  / Gary SNF 1 (a)
laurell-R Laurell Manual Resist Spinner All Phil Mario  / Gary SNF 1 (a)
svgcoat / svgcoat2 SVG Resist Coat Tracks 1&2 All Uli / Phil Gary  / Mario SNF 1.25 (a)
evgspraycoat EVG 101 Resist Spray Coater All Phil Gary  / Mario SNF 1.5 (a)

 

Optical Photolithography: Exposure, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
asml ASML PAS 550 0/60 i-line Stepper All 1.Job Writing: Phil
2.Tool Training: Phil
Gary  / Mario SNF

Job Writing: 2

Tool Training: 2 (a)

evalign EV Group Contact Aligner All Phil Mario  / Gary SNF 1.5 (a)
 karlsuss / karlsuss2 Karl Suss MA-6 Contact Aligner 1&2   All  Uli/ Phil  Gary   / Mario  SNF  1.5 (a)

 

ExFab: Patterning

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
3d-wax-printer Solidscape 3D Wax Printer Flexible Michelle Michelle ExFab, 155 TBD
nanoinkjet Fujifilm Dimatix Ink Jet Printer Flexible Michelle Michelle ExFab, 155 7.5 hrs for equipment,  additional Standard Staff Hourly Rates charged for ink forumulation training.
nanoscribe Nanoscribe Photonics GT All Swaroop Swaroop ExFab, Stinson 2 hrs
heidelberg/heidelberg2 Heidelberg MLA 150 All Swaroop Swaroop ExFab, Stinson 2 hrs (a)
optomec-Printer Optomec Printer Flexible Swaroop Swaroop / Gary ExFab, 155A Introduction/design - 2 hrs
Hands-on training - 6 hrs
Demonstration - 6 hrs
alveole Alveole Primo Flexible Swaroop/Gaspard Swaroop/Gaspard Exfab, 151 2 hrs

 

Optical Photolithography: Develop, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
svgdev / svgdev2 SVG Resist Develop tracks 1&2 All Uli / Phil Gary  / Mario SNF 0.5 (a)

 

Optical Photolithography: Ovens, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
bluem Blue M Programmable Oven Flexible Phil Mario / Gary SNF 0.5 (a)
oven110 110 C Oven All Uli Mario / Gary SNF (a)
oven90 90 C Oven All Uli Mario / Gary SNF (a)
ovensinge Singe Oven All Uli Mario / Gary SNF (a)
white-oven White Oven Flexible Phil Mario / Gary SNF 0.5 (a)
uvcure Ultraviolet Photoresist Cure All Phil Mario / Gary SNF TBD (a)
yes YES Prime Oven All Uli / Phil Mario / Gary SNF (a)

 

Chemical Vapor Deposition (CVD): Low Pressure, click here for summary

Badger Name
Lab Tab
- Sub Task
Tool
Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-LPCVD-teos2 teos2 Clean Maurice Ray SNF 3 (b)
SNF-LPCVD-thermcolto Thermco LPCVD Low Temperature Oxide Flexible Maurice Ray SNF 3 (b)
SNF-LPCVD-thermoconitride1 Thermo LPCVD Nitride Clean Maurice Ray SNF 3 (b)
SNF-LPCVD-thermocopoly1 Thermco LPCVD Poly Clean Maurice Ray SNF 3 (b)
SNF-LPCVD-thermocopoly2 Thermco LPCVD Poly2 Flexible Maurice Ray SNF 3 (b)
SNF-LPCVD-tylanbpsg LPCVD BPSG Clean/ Semiclean Maurice Ray SNF 3 (b)
nSIL-Deposition-nanotube First Nano carbon nanotube CVD furnace Flexible Xiaoqing/
Greg Pitner
Ray nSIL 3
nSIL-Deposition-CVD-Graphene Aixtron Black Magic graphene CVD furnace Flexible Xiaoqing/ Chris Neumann, Yong Cheol Shin, Ning Wang Ray nSIL 3

 

Chemical Vapor Deposition (CVD): Plasma Enhanced, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
sts STS Plasma Enhanced CVD Flexible Usha Jim SNF 2 X 1.25
hdpcvd PlasmaTherm Versaline HDP VCD System All Usha/
Jim M
Elmer / Mike SNF 1.0
 ccp PlasmaTherm Shuttlecock PECVD System All Usha/
Jim M
Elmer / Mike SNF 1.0

 

Chemical Vapor Deposition (CVD): Atomic Layer Deposition ALD

Badger Name Equipment Name  Materials/
Equip Group
Process Maintenance/
Repair 
Location Training Hrs/
Notes
savannah Savannah Atomic Layer Deposition System Flexible Michelle Jim SNF 3.0
 fiji1/fiji2 Fiji Atomic Layer Deposition - (fiji1) semi-clean chamber and (fiji2) gold chamber Semi-Clean (Fiji1)
Flexible (Fiji2)
Michelle Jim SNF 3.0
fiji3 Fiji Atomic Layer Deposition- gold chamber, dielectric dedicated Flexible Michelle Jim SNF covered in fiji1/2
mvd Savannah/Plasma Cleaner in Glovebox System Flexible Michelle Jim SNF 3.0

 

Chemical Vapor Deposition (CVD):Epitaxial, click here or summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-epi2 Applied Materials Centurion Epitaxial System Clean Maurice Carsen SNF 2x2
MOCVD-aix200 Aixtron MOCVD - III-V system Flexible Xiaoqing Ray/ Jim MOCVD 2x2+final
MOCVD-aix-ccs Aixtron MOCVD - III-N system Flexible Xiaoqing Ray/ Jim MOCVD 2x2+final

Metallization and Sputtering, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-Metalization-Evaporation-innotec Innotec ES26C E-Gun Evaporator Flexible Maurice Jim SNF 2 X 3
SNF-Metalica Metallica Sputter System Flexible Xiaoqing/ Ludwig Galambos Jim SNF 2 X 3hr
SNF-Intlvac_sputter IntlVac Nanochrome I Sputter System Clean/ Semiclean Maurice Jim SNF 2 x 1
SNF-Metalization-Evaporation-intlvac_evap IntlVac Nanochrome I Evaporator System Clean/ Semiclean Maurice Jim SNF 2
 
nSIL-Depostion-lesker-sputter Lesker Sputter Flexible Maurice Carsen EXFab 155A 1
nSIL-aja-evap AJA Evaporator Flexible Xiaoqing Carsen EXFab 155A  
n Sil
-Deposition
- hummer
Hummer V Sputter Coater Flexible Carsen Gary Exfab, 155A 1 hr
           
 SNSF-Evaporation-MFS Small  MFS Small Flexible  Tom Carver   Tom Carver  SNSF  
 SNSF-Evaporation-MFS large  MFS large    Tom Carver   Tom Carver  SNSF  
 SNSF-Sputtering-Oerlikon Leybold  Oerlikon Leybold    Tom Carver   Tom Carver  SNSF  

Ex Fab: Deposition

Badger Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location Training Hrs/
Notes
parcoater PDS 2010 LABCOTER 2 Flexible Michelle Ray ExFab, 155 3

Dry Etching, click here for summary

Badger Name
Lab Tab
- Sub Task
Tool
Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-Dry Etching amtetcher AMT Oxide Plasma Etcher Clean / Semiclean Usha Elmer / Mike SNF 1
SNF-Dry Etching drytek2 Drytek 100 Plasma Etcher All Usha Elmer / Mike SNF 1 (c)
SNF-Dry Etching gasonics Gasonics Aura Asher Clean / Semiclean see equipment page Elmer / Mike SNF  
SNF-Dry Etching lampoly Lam Research TCP 9400 Poly Etcher Clean Usha Elmer / Mike SNF 1
SNF-Dry Etching matrix Matrix Plasma Resist Strip Flexible Usha / Uli Elmer / Mike SNF 0.5
SNF-Dry Etching mrc MRC Reactive Ion Etcher Flexible Usha Elmer / Mike SNF 1.5
SNF-Dry Etching p5000etch Applied Materials P5000 Etcher Semiclean Usha Elmer / Mike SNF 1.5
SNF-Dry Etching
PT-DSE
Plasma Therm Versaline LL ICP Deep Silicon Etcher Flexible Usha
Elmer / Mike
SNF 1.5
SNF-Dry Etching
PT-MTL
Plasma Therm Versaline LL ICP Metal Etcher Flexible Usha
Elmer / Mike
SNF 1
SNF-Dry Etching 
PT-Ox
Plasma Therm Versaline LL ICP Dielectric Etcher Flexible Usha Elmer / Mike SNF 1
         
SNF-Dry Etching
Ox-35
Oxford III-V etcher Flexible see equipment page Elmer / Mike SNF 1.5
SNF-Dry Etching
oxford-rie
Oxford Dielectric Etcher Flexible Usha Elmer SNF 1
SNF-Dry Etching stsetch STS Deep RIE Etcher Clean Usha Elmer / Mike SNF 1
SNF-Dry Etching
uetch
SPTS uetch vapor etch All Uli / Usha Jim  / Mike SNF 0.5
SNF-Dry Etching xactix Xactix Xenon Difluoride Etcher Clean / Semiclean /Flexible Uli / Usha Elmer / Mike SNF 0.5
nSiL- Other
plasma-etch
Plasmaetch PE-50 Flexible Michelle Jim McVittie SNF
Room 155
0.5
SNSF-FCR
Ion Mill
Intlvac Ion Mill Etcher Flexible TBA   SNSF/ Spilker
Flexible Cleanroom
 
SNSF-NPCR
RIE: Oxford
PlasmaPro 80
Oxford PlasmaPro 80 - Reactive Ion etcher Flexible Usha   SNSF/ Spilker
Nanopatterning
Cleanroom
1

 

Annealing, Oxidation, and Doping, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
Thermco1-3 Thermco Oxidation Furnace  Clean Maurice Ray SNF 1 (b)
Thermco4 Thermco Oxidation Furnace  Flexible Maurice Ray SNF 1
TylanFGA FormingGas Anneal Furnace Semiclean Maurice Ray SNF 1
Tylan6 Phos Predep Furnace (POCl3) Clean Maurice Ray SNF (b)(d)
Tylan9 Forming Gas Anneal Furnace Flexible Maurice Ray SNF 3 (b)(d)

 

Rapid Thermal Annealing, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-Annealing-aw610-l AllWin 610 Rapid Thermal Annealer Clean/Semi-clean Maurice Elmer / Mike SNF 1
SNF-Annealing-aw610-r AllWin 610 Rapid Thermal Annealer Flexible Maurice Elmer / Mike SNF 1

 

Wetbenches, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
cpd Critical Point Dryer Flexible Uli / Maurice Jim / Mike SNF 2
lithosolv Lithography Solvent Bench Flexible Uli / Phil Mario SNF (a)
  Mask Scrubber   Phil Mario SNF  
wbclean-1 and 2 (former wbdiff) Clean-1 and 2 Wetbench Clean Uli Jim / Gary SNF 2.25
wbebeam Ebeam Process Wetbench All Swaroop Gary  / Mario SNF NA
wbflexcorr-1 and-2 (former wbgaas) Flexible Corrosive Wetbench and GaAs Flexible and GaAs Uli / Mary Jim / Gary SNF 2.25
wbflexcorr-3 and 4 (former wbgen) Flexible Corrosive Wetbench Flexible (no GaAs) Uli / Mary Jim / Gary SNF 2.25
wbgen2-hp / wbgen2-rfx Germanium wbgen-2 Clean Ge Mary Jim / Gary SNF (b)
wbmetal Metal Wetbench Semiclean Uli Jim / Gary SNF .75
wbmiscres Miscellaneous Photoresist Wetbench Flexible Phil / Uli Mario / Gary SNF (a)
wbclean_res-
piranha-hf-hotphos
Clean_resist-piranha-HF Wet Bench Clean Uli Jim / Gary SNF covered in wbclean-1 and2
wbdecon/clean-3 (former wbsilicide) Decon and Clean-3 Wetbench Clean Uli Jim / Gary SNF wbclean-1 and 2 required
wbflexsolv Solvent Wetbench Flexible Uli / Mary Jim / Gary  / Mario SNF .5

 

ExFab: Wet Processing

 

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
WbExfab_Solv WbExfab_Solv All Swaroop Gary ExFab, Stinson 1 hr
Headway 3 Headway 3 All Swaroop Gary ExFab, Stinson 1 hr
WbExfab_Dev WbExfab_Dev All Swaroop Gary ExFab, Stinson 1 hr
Laurel_Dev-etch Laurel_Dev-etch All Swaroop Gary ExFab, Stinson 2 hrs
Micromist-coater Micromist Coater Flexible Swaroop Swaroop ExFab, 155 2 hrs

 

Wafer Bonding, Sawing, and Polishing

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
nSIL-Machining-cmp GnP Poli-400L Hardware for both contaminated and clean Michelle / Gary Yama Jim H. room 159 1.5
SNF-Waferbond-evbond EV Group Wafer Bonder Flexible Phil /Mary Mario / Gary SNF 4
SNF-Waferbond-ksbonder Karl Suss Wafer Bonder clean Phil Mario / Gary SNF 1
 nSiL-Other-flipchipbonder  Finetech Lambda  Flexible  Usha  Elmer  SNF/L106/107
(Stinson)
 1
nSIL-Machining-DISCO wafersaw DISCO Wafer Saw Flexible Xiaoqing / Usha Elmer/ Gary room 159 1.5
nSIL-Machining-DISCO backgrind  DISCO Backgrind  Flexible  Xiaoqing / Usha  TBD  room 159  1.5
 nSIL-Machining-Lasercutter Epilog Fusion M2 Lasercutter  Flexible  Maurice  Carsen  room155A 1.0
 nSIL-Machining-Micromill  Micromill  Flexible  Elmer  Elmer  room155A  1.0

 

Characterization and Testing, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
nSil
-Characterization
 -keyence
Keyence Digital Microscope VHX-6000 All Graham Graham SNF .5
nSil
-Characterization
 - afm2
Digital Instruments Nanoscope 3000 AFM All Marcin Mario / Gary SNF 3 to 4 (two sessions)
nSil
-Characterization
 - alphastep
Alphastep 500 Profilometer Flexible Uli Mario / Gary SNF .25
nanospec / nanospec2 Nanospec Film Thickness Measurement System All Uli Gary / Mario SNF .25
prometrix Prometrix Resistivity Mapping System All Uli / Maurice Gary / Mario SNF .5
p2 Tencor P2 Profilometer Semiclean/
Clean
Uli Gary / Mario SNF .5
nSil
-Characterization
 - s-neox
Sensofar S-neox, non contact 3D optical profiling All Uli Gary / Mario SNF 1
stresstest Flexus 2320 All Uli Gary SNF .75
woollam J.A. Woollam M2000 Spectroscopic Ellipsometer  All Michelle Gary SNF 2
micromanipulator6000   micromanipulator6000 IV-CV probe station All Xiaoqing Jim SNF 0.5
nSiL
-Characterization
-malvern-dls
Malvern Dynamic Light Scattering (DLS) Zetasizer All Michelle TBD Mavericks (Room 155) NA
nSiL
-Characterization
-Sinton Lifetime Tester
Sinton Lifetime Tester Flexible Swaroop Jim Exfab, 151 1 hr
nSiL
-Characterization
-AFM-Asylum
AFM-Asylum Flexible Marcin Gary Exfab, 151 3 to 4 (two sessions)
nSiL
-Characterization
-biologic
Bio-Logic Potentiostat Flexible Michelle Michelle ExFab, 155 TBD
nSiL
-Characterization
-jasco-uv-vis-nir

Jasco UV-Vis-NIR Spectrometer

Flexible

Michelle

Michelle

ExFab, 155

TBD

 

 Ex Fab: Controlled Environment

Badger Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/Repair Location Training Hrs/
Notes
glovebox-l Glovebox- side with spin coater Flexible Michelle Ray ExFab, 155 TBD
glovebox-r Glovebox- side with transfer station Flexible Michelle Ray ExFab, 155 TBD
 fumehood1  Fumehood 1 Flexible Michelle  Michelle ExFab, 155  NA
 fumehood2 Fumehood 2 Flexible Michelle Michelle ExFab, 155  NA
fumehood3 Fumehood 3 Flexible Michelle Michelle ExFab, 155  NA
fumehood4 Fumehood 4 Flexible Michelle Michelle ExFab, 155  NA

Ex Fab: Other

Badger Name Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/Repair Location Training Hrs/
Notes
centrifuge Fisher AccuSpin 24C Flexible Michelle Michelle ExFab, 155 TBD
disperser IKA disperser Flexible Michelle Michelle ExFab, 155 TBD
thinky-mixer Thinky mixer Flexible Michelle Michelle ExFab, 155 NA
sonicator Q700 Probe Sonicator Flexible Michelle Michelle ExFab, 155 TBD
spincoat-g3p8 SCS G3P-8 Spin Coater Flexible Michelle Gary ExFab, 155 TBD
hotplate-1 Torrey Pines Hotplate Flexible Michelle Gary/Jim ExFab, 155 NA
 

 

Last modified: 30 Apr 2020