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Function and Method(s):
Patterning
Equipment Used:
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Released Lithium Niobate Structures on Silicon using the PT-DSE
Released Lithium Niobate Structures on Silicon using the PT-DSE
PDF File:
Released Lithium Niobate Structures on Silicon using the PT-DSE
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Materials
Aluminum (Al)
Lithium Niobate (LiNb)
Thursday, August 10, 2023
