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Equipment Used:
Lesker Sputter (lesker-sputter)
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
Oxford Dielectric Etcher (oxford-rie)
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Etching Block Copolymer Directed Self-Assembly Holes Mid-Course Report
Etching Block Copolymer Directed Self-Assembly Holes
PDF File:
etching_block_copolymer_directed_self-assembly_holes_mid-course_report_1.pdf
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Wednesday, April 14, 2021
