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Stanford Nanofabrication Facility: Dry Etching (Part 2 of 4) - Basics of Plasmas & Types of Tools

Dry Etching - Basics of Plasmas & Types of Tools (Part 2 of 4)
Dr. James McVittie goes into further detail on Dry Etching: Basics of Plasmas & Types of Dry Etching Tools (Part 2 of 4) from Stanford Nanofabrication Facility (SNF). This video is part of an open online course found here: https://lagunita.stanford.edu/courses/course-v1:Engineering+NanoFab01+Ongoing/info
Friday, May 21, 2021