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Equipment Used:
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Oxford Dielectric Etcher (oxford-rie)
Oxford III-V etcher (Ox-35)
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Lam Research TCP 9400 Poly Etcher (lampoly)
AMAT P5000 Etcher (p5000etch)
Dry Etch Equipment Troubleshooting
Dry Etch Equipment Troubleshooting
Source:
Dry Etch Equipment Troubleshooting
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