This table has links to film data that has been submitted by SNF ALD users. The precursor column has links to the MSDS for each chemical.
If you would like to submit any data for the community, please let Michelle know!
A couple of useful links that help navigate ALD research in general (not specific to the SNF) are:
- www.plasma-ald.com: a website created by Dr. Mark Sowa that has a survey of plasma ALD literature
- www.atomiclimits.com/: a website created by Professor Erwin Kessels, Eindhoven University, that provides a dynamic discussion of the ALD landscape.